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Electrical, optical and structural investigation of plasma-enhanced chemical-vapour-deposited amorphous silicon oxynitride films for solar cell applications

Electrical, optical and structural investigation of plasma-enhanced chemical-vapour-deposited amorphous silicon oxynitride films for solar cell applications

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BRINKMANN, Nils, Daniel SOMMER, Gabriel MICARD, Giso HAHN, Barbara TERHEIDEN, 2013. Electrical, optical and structural investigation of plasma-enhanced chemical-vapour-deposited amorphous silicon oxynitride films for solar cell applications. In: Solar Energy Materials and Solar Cells. 108, pp. 180-188. ISSN 0927-0248. Available under: doi: 10.1016/j.solmat.2012.09.025

@article{Brinkmann2013Elect-23116, title={Electrical, optical and structural investigation of plasma-enhanced chemical-vapour-deposited amorphous silicon oxynitride films for solar cell applications}, year={2013}, doi={10.1016/j.solmat.2012.09.025}, volume={108}, issn={0927-0248}, journal={Solar Energy Materials and Solar Cells}, pages={180--188}, author={Brinkmann, Nils and Sommer, Daniel and Micard, Gabriel and Hahn, Giso and Terheiden, Barbara} }

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