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Advances in the understanding of phosphorus silicate glass (PSG) formation for accurate process simulation of phosphorus diffusion

Advances in the understanding of phosphorus silicate glass (PSG) formation for accurate process simulation of phosphorus diffusion

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MICARD, Gabriel, Amir DASTGHEIB-SHIRAZI, Michael STEYER, Hannes WAGNER, Pietro ALTERMATT, Giso HAHN, 2012. Advances in the understanding of phosphorus silicate glass (PSG) formation for accurate process simulation of phosphorus diffusion. 27th European Photovoltaic Solar Energy Conference and Exhibition. Messe Frankfurt and Congress Center Frankfurt, Germany, 24. Sep 2012 - 28. Sep 2012. In: 27th European Photovoltaic Solar Energy Conference and Exhibition. 27th European Photovoltaic Solar Energy Conference and Exhibition. Messe Frankfurt and Congress Center Frankfurt, Germany, 24. Sep 2012 - 28. Sep 2012. Munich, Germany:WIP-Renewable Energies, pp. 1355-1359. ISBN 3-936338-28-0. Available under: doi: 10.4229/27thEUPVSEC2012-2BV.5.8

@inproceedings{Micard2012Advan-22799, title={Advances in the understanding of phosphorus silicate glass (PSG) formation for accurate process simulation of phosphorus diffusion}, year={2012}, doi={10.4229/27thEUPVSEC2012-2BV.5.8}, isbn={3-936338-28-0}, address={Munich, Germany}, publisher={WIP-Renewable Energies}, booktitle={27th European Photovoltaic Solar Energy Conference and Exhibition}, pages={1355--1359}, author={Micard, Gabriel and Dastgheib-Shirazi, Amir and Steyer, Michael and Wagner, Hannes and Altermatt, Pietro and Hahn, Giso} }

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