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Influence of hydrogen on interstitial iron concentration in multicrystalline silicon

Influence of hydrogen on interstitial iron concentration in multicrystalline silicon

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KARZEL, Philipp, Alexander FREY, Susanne FRITZ, Giso HAHN, 2011. Influence of hydrogen on interstitial iron concentration in multicrystalline silicon. 26th European Photovoltaic Solar Energy Conference and Exhibition. Hamburg, Germany, Sep 5, 2011 - Sep 9, 2011. In: OSSENBRINK, H., ed. and others. Proceedings of the 26th European Photovoltaic Solar Energy Conference and Exhibition : the most inspiring platform for the global PV solar sector. Munich, Germany:WIP-Renewable Energies, pp. 909-913. ISBN 3-936338-27-2. Available under: doi: 10.4229/26thEUPVSEC2011-2BO.5.4

@inproceedings{Karzel2011Influ-19204, title={Influence of hydrogen on interstitial iron concentration in multicrystalline silicon}, year={2011}, doi={10.4229/26thEUPVSEC2011-2BO.5.4}, isbn={3-936338-27-2}, address={Munich, Germany}, publisher={WIP-Renewable Energies}, booktitle={Proceedings of the 26th European Photovoltaic Solar Energy Conference and Exhibition : the most inspiring platform for the global PV solar sector}, pages={909--913}, editor={Ossenbrink, H.}, author={Karzel, Philipp and Frey, Alexander and Fritz, Susanne and Hahn, Giso} }

<rdf:RDF xmlns:dcterms="http://purl.org/dc/terms/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#" xmlns:bibo="http://purl.org/ontology/bibo/" xmlns:dspace="http://digital-repositories.org/ontologies/dspace/0.1.0#" xmlns:foaf="http://xmlns.com/foaf/0.1/" xmlns:void="http://rdfs.org/ns/void#" xmlns:xsd="http://www.w3.org/2001/XMLSchema#" > <rdf:Description rdf:about="https://kops.uni-konstanz.de/rdf/resource/123456789/19204"> <dc:language>eng</dc:language> <dc:creator>Frey, Alexander</dc:creator> <dc:creator>Hahn, Giso</dc:creator> <dc:creator>Karzel, Philipp</dc:creator> <dc:date rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2012-05-04T07:02:08Z</dc:date> <dc:contributor>Hahn, Giso</dc:contributor> <dcterms:isPartOf rdf:resource="https://kops.uni-konstanz.de/rdf/resource/123456789/41"/> <dspace:hasBitstream rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/19204/2/Karzel_192048.pdf"/> <dc:rights>terms-of-use</dc:rights> <dcterms:hasPart rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/19204/2/Karzel_192048.pdf"/> <dc:contributor>Fritz, Susanne</dc:contributor> <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/> <dc:contributor>Frey, Alexander</dc:contributor> <dcterms:title>Influence of hydrogen on interstitial iron concentration in multicrystalline silicon</dcterms:title> <dc:contributor>Karzel, Philipp</dc:contributor> <foaf:homepage rdf:resource="http://localhost:8080/jspui"/> <dcterms:rights rdf:resource="https://kops.uni-konstanz.de/page/termsofuse"/> <dcterms:abstract xml:lang="eng">The purpose of this work is to investigate the influence of in-diffusing atomic H into a multicrystalline silicon (mc-Si) wafer on the concentration of interstitial iron (Fei). Vertically adjacent wafers were annealed with and without in-diffusing H. In-diffusion was realized by exposing the samples to a microwave induced remote hydrogen plasma (MIRHP). [Fei] was detected based on lifetime measurements before and after dissociating the FeB complex. Surface passivation was achieved by a quinhydrone-methanol solution to avoid further temperature steps and indiffusion of H during passivation. From [Fei] measurements before and after the annealing steps with and without H, the influence of H alone on [Fei] could be accessed. The results were compared to experiments where SiNx:H layers were used as surface passivation for [Fei] measurements after low temperature anneals (300°C – 500°C). It could be shown that a H plasma atmosphere has a strong additional effect on the reduction of [Fei] compared to temperature effects alone. This additional reduction is proportional to the [Fei] after the annealing step alone.</dcterms:abstract> <dc:creator>Fritz, Susanne</dc:creator> <dcterms:bibliographicCitation>Publ. in: Proceedings / 26th European Photovoltaic Solar Energy Conference and Exhibition : the most inspiring platform for the global PV solar sector ; CCH Congress Centre and International Fair, Hamburg, Germany, Conference 5 - 9 September 2011, exhibition 5 - 8 September 2011 / ed. by H. Ossenbrink ... . - München : WIP Renewable Energies, 2011. - S. 909 - 913. - ISBN 3-936338-27-2</dcterms:bibliographicCitation> <dspace:isPartOfCollection rdf:resource="https://kops.uni-konstanz.de/rdf/resource/123456789/41"/> <bibo:uri rdf:resource="http://kops.uni-konstanz.de/handle/123456789/19204"/> <dcterms:issued>2011</dcterms:issued> <dcterms:available rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2012-05-04T07:02:08Z</dcterms:available> </rdf:Description> </rdf:RDF>

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