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Influence of hydrogen on interstitial iron concentration in multicrystalline silicon

Influence of hydrogen on interstitial iron concentration in multicrystalline silicon

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KARZEL, Philipp, Alexander FREY, Susanne FRITZ, Giso HAHN, 2011. Influence of hydrogen on interstitial iron concentration in multicrystalline silicon. 26th European Photovoltaic Solar Energy Conference and Exhibition. CCH Congress Centre and International Fair, Hamburg, Germany, 5. Sep 2011 - 9. Sep 2011. In: OSSENBRINK, H., ed. and others. Proceedings / 26th European Photovoltaic Solar Energy Conference and Exhibition : the most inspiring platform for the global PV solar sector. 26th European Photovoltaic Solar Energy Conference and Exhibition. CCH Congress Centre and International Fair, Hamburg, Germany, 5. Sep 2011 - 9. Sep 2011. Munich, Germany:WIP-Renewable Energies, pp. 909-913. ISBN 3-936338-27-2. Available under: doi: 10.4229/26thEUPVSEC2011-2BO.5.4

@inproceedings{Karzel2011Influ-19204, title={Influence of hydrogen on interstitial iron concentration in multicrystalline silicon}, year={2011}, doi={10.4229/26thEUPVSEC2011-2BO.5.4}, isbn={3-936338-27-2}, address={Munich, Germany}, publisher={WIP-Renewable Energies}, booktitle={Proceedings / 26th European Photovoltaic Solar Energy Conference and Exhibition : the most inspiring platform for the global PV solar sector}, pages={909--913}, editor={Ossenbrink, H.}, author={Karzel, Philipp and Frey, Alexander and Fritz, Susanne and Hahn, Giso} }

<rdf:RDF xmlns:dcterms="http://purl.org/dc/terms/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#" xmlns:bibo="http://purl.org/ontology/bibo/" xmlns:dspace="http://digital-repositories.org/ontologies/dspace/0.1.0#" xmlns:foaf="http://xmlns.com/foaf/0.1/" xmlns:void="http://rdfs.org/ns/void#" xmlns:xsd="http://www.w3.org/2001/XMLSchema#" > <rdf:Description rdf:about="https://kops.uni-konstanz.de/rdf/resource/123456789/19204"> <dc:language>eng</dc:language> <dc:creator>Frey, Alexander</dc:creator> <dc:creator>Hahn, Giso</dc:creator> <dc:creator>Karzel, Philipp</dc:creator> <dc:date rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2012-05-04T07:02:08Z</dc:date> <dc:contributor>Hahn, Giso</dc:contributor> <dcterms:isPartOf rdf:resource="https://kops.uni-konstanz.de/rdf/resource/123456789/41"/> <dc:contributor>Fritz, Susanne</dc:contributor> <dcterms:rights rdf:resource="http://nbn-resolving.org/urn:nbn:de:bsz:352-20140905103605204-4002607-1"/> <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/> <dc:contributor>Frey, Alexander</dc:contributor> <dcterms:title>Influence of hydrogen on interstitial iron concentration in multicrystalline silicon</dcterms:title> <dc:contributor>Karzel, Philipp</dc:contributor> <foaf:homepage rdf:resource="http://localhost:8080/jspui"/> <dc:rights>deposit-license</dc:rights> <dcterms:abstract xml:lang="eng">The purpose of this work is to investigate the influence of in-diffusing atomic H into a multicrystalline silicon (mc-Si) wafer on the concentration of interstitial iron (Fei). Vertically adjacent wafers were annealed with and without in-diffusing H. In-diffusion was realized by exposing the samples to a microwave induced remote hydrogen plasma (MIRHP). [Fei] was detected based on lifetime measurements before and after dissociating the FeB complex. Surface passivation was achieved by a quinhydrone-methanol solution to avoid further temperature steps and indiffusion of H during passivation. From [Fei] measurements before and after the annealing steps with and without H, the influence of H alone on [Fei] could be accessed. The results were compared to experiments where SiNx:H layers were used as surface passivation for [Fei] measurements after low temperature anneals (300°C – 500°C). It could be shown that a H plasma atmosphere has a strong additional effect on the reduction of [Fei] compared to temperature effects alone. This additional reduction is proportional to the [Fei] after the annealing step alone.</dcterms:abstract> <dc:creator>Fritz, Susanne</dc:creator> <dcterms:bibliographicCitation>Publ. in: Proceedings / 26th European Photovoltaic Solar Energy Conference and Exhibition : the most inspiring platform for the global PV solar sector ; CCH Congress Centre and International Fair, Hamburg, Germany, Conference 5 - 9 September 2011, exhibition 5 - 8 September 2011 / ed. by H. Ossenbrink ... . - München : WIP Renewable Energies, 2011. - S. 909 - 913. - ISBN 3-936338-27-2</dcterms:bibliographicCitation> <dspace:isPartOfCollection rdf:resource="https://kops.uni-konstanz.de/rdf/resource/123456789/41"/> <bibo:uri rdf:resource="http://kops.uni-konstanz.de/handle/123456789/19204"/> <dcterms:issued>2011</dcterms:issued> <dcterms:available rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2012-05-04T07:02:08Z</dcterms:available> </rdf:Description> </rdf:RDF>

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