Optical temperature measurements on thin freestanding silicon membranes

Schmotz, Markus; Bookjans, Patrick; Scheer, Elke; Leiderer, Paul

Optical temperature measurements on thin freestanding silicon membranes

Dateien

Schmotz_Optical.pdfGröße: 1.19 MBDownloads: 850

Datum

2010

Autor:innen

Schmotz, Markus

Bookjans, Patrick

Scheer, Elke

Leiderer, Paul

Publikationstyp

Zeitschriftenartikel

Publikationsstatus

Published

Erschienen in

Review of Scientific Instruments. 2010, 81(11), 114903. ISSN 0034-6748. eISSN 1089-7623. Available under: doi: 10.1063/1.3499503

Zusammenfassung

We report on a contactless, all-optical method to derive thermal properties of 340 nm thin, 640×640 μm2 wide, freestanding silicon membranes. Exploiting the temperature dependent optical transmissivity of 4×10−3/K between 300 and 470 K, we are able to measure the temperature of the membrane with millikelvin thermal, micrometer lateral, and nanosecond temporal resolution. Experiments such as the decay of a transient thermal grating with spacings between 5 and 30 μm, measured in first order of diffraction, as well as heat diffusion in a statically heated membrane are reported in this letter. For the latter case an example of a nanostructured membrane by means of focused ion beam milling is given.

Fachgebiet (DDC)

530 Physik

Zitieren

ISO 690

SCHMOTZ, Markus, Patrick BOOKJANS, Elke SCHEER, Paul LEIDERER, 2010. Optical temperature measurements on thin freestanding silicon membranes. In: Review of Scientific Instruments. 2010, 81(11), 114903. ISSN 0034-6748. eISSN 1089-7623. Available under: doi: 10.1063/1.3499503

BibTex

@article{Schmotz2010-11Optic-14138,
  year={2010},
  doi={10.1063/1.3499503},
  title={Optical temperature measurements on thin freestanding silicon membranes},
  number={11},
  volume={81},
  issn={0034-6748},
  journal={Review of Scientific Instruments},
  author={Schmotz, Markus and Bookjans, Patrick and Scheer, Elke and Leiderer, Paul},
  note={Article Number: 114903}
}

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