Optical temperature measurements on thin freestanding silicon membranes

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SCHMOTZ, Markus, Patrick BOOKJANS, Elke SCHEER, Paul LEIDERER, 2010. Optical temperature measurements on thin freestanding silicon membranes. In: Review of Scientific Instruments. 81(11), 114903. ISSN 0034-6748. eISSN 1089-7623

@article{Schmotz2010-11Optic-14138, title={Optical temperature measurements on thin freestanding silicon membranes}, year={2010}, doi={10.1063/1.3499503}, number={11}, volume={81}, issn={0034-6748}, journal={Review of Scientific Instruments}, author={Schmotz, Markus and Bookjans, Patrick and Scheer, Elke and Leiderer, Paul}, note={Article Number: 114903} }

<rdf:RDF xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#" xmlns:bibo="http://purl.org/ontology/bibo/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:dcterms="http://purl.org/dc/terms/" xmlns:xsd="http://www.w3.org/2001/XMLSchema#" > <rdf:Description rdf:about="https://kops.uni-konstanz.de/rdf/resource/123456789/14138"> <dc:language>eng</dc:language> <dc:contributor>Schmotz, Markus</dc:contributor> <dcterms:available rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2011-08-03T07:53:36Z</dcterms:available> <dcterms:issued>2010-11</dcterms:issued> <dc:date rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2011-08-03T07:53:36Z</dc:date> <dc:creator>Leiderer, Paul</dc:creator> <dc:rights>deposit-license</dc:rights> <dcterms:bibliographicCitation>First publ. in: Review of Scientific Instruments 81 (2010), 11, 114903</dcterms:bibliographicCitation> <dcterms:title>Optical temperature measurements on thin freestanding silicon membranes</dcterms:title> <dc:creator>Schmotz, Markus</dc:creator> <dc:creator>Scheer, Elke</dc:creator> <dcterms:abstract xml:lang="eng">We report on a contactless, all-optical method to derive thermal properties of 340 nm thin, 640×640 μm2 wide, freestanding silicon membranes. Exploiting the temperature dependent optical transmissivity of 4×10−3/K between 300 and 470 K, we are able to measure the temperature of the membrane with millikelvin thermal, micrometer lateral, and nanosecond temporal resolution. Experiments such as the decay of a transient thermal grating with spacings between 5 and 30 μm, measured in first order of diffraction, as well as heat diffusion in a statically heated membrane are reported in this letter. For the latter case an example of a nanostructured membrane by means of focused ion beam milling is given.</dcterms:abstract> <dc:contributor>Bookjans, Patrick</dc:contributor> <bibo:uri rdf:resource="http://kops.uni-konstanz.de/handle/123456789/14138"/> <dc:creator>Bookjans, Patrick</dc:creator> <dcterms:rights rdf:resource="http://nbn-resolving.org/urn:nbn:de:bsz:352-20140905103605204-4002607-1"/> <dc:contributor>Scheer, Elke</dc:contributor> <dc:contributor>Leiderer, Paul</dc:contributor> </rdf:Description> </rdf:RDF>

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