@inproceedings{Geml2022Influ-67408,
  year={2022},
  doi={10.4229/WCPEC-82022-lCV.2.15},
  title={Influence of AlOx Deposition Temperature on the Passivation Mechanism of AlOx/SiNy:H Stacks},
  publisher={WIP},
  address={München},
  booktitle={Proceedings of the WCPEC-8 2022},
  pages={110--112},
  author={Geml, Fabian and Sanz, Sarah and Plagwitz, Heiko and Hahn, Giso}
}

<rdf:RDF
    xmlns:dcterms="http://purl.org/dc/terms/"
    xmlns:dc="http://purl.org/dc/elements/1.1/"
    xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#"
    xmlns:bibo="http://purl.org/ontology/bibo/"
    xmlns:dspace="http://digital-repositories.org/ontologies/dspace/0.1.0#"
    xmlns:foaf="http://xmlns.com/foaf/0.1/"
    xmlns:void="http://rdfs.org/ns/void#"
    xmlns:xsd="http://www.w3.org/2001/XMLSchema#" > 
  <rdf:Description rdf:about="https://kops.uni-konstanz.de/server/rdf/resource/123456789/67408">
    <dc:creator>Hahn, Giso</dc:creator>
    <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/>
    <dcterms:issued>2022</dcterms:issued>
    <dcterms:title>Influence of AlOx Deposition Temperature on the Passivation Mechanism of AlOx/SiNy:H Stacks</dcterms:title>
    <foaf:homepage rdf:resource="http://localhost:8080/"/>
    <dc:creator>Geml, Fabian</dc:creator>
    <dc:contributor>Plagwitz, Heiko</dc:contributor>
    <dc:creator>Plagwitz, Heiko</dc:creator>
    <dspace:isPartOfCollection rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <dc:language>eng</dc:language>
    <dcterms:available rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2023-07-21T10:52:15Z</dcterms:available>
    <dcterms:isPartOf rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <dc:contributor>Hahn, Giso</dc:contributor>
    <dc:creator>Sanz, Sarah</dc:creator>
    <dc:contributor>Sanz, Sarah</dc:contributor>
    <bibo:uri rdf:resource="https://kops.uni-konstanz.de/handle/123456789/67408"/>
    <dc:contributor>Geml, Fabian</dc:contributor>
    <dc:date rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2023-07-21T10:52:15Z</dc:date>
  </rdf:Description>
</rdf:RDF>