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Deposition of mass-selected cluster ions using a pulsed arc cluster-ion source

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298_applph_2001.pdf
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2001

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Klipp, Björn
Grass, Martin
Müller, Jürgen
Stolcic, Davor
Schlenker, Thomas

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http://nbn-resolving.de/urn:nbn:de:bsz:352-opus-27903
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https://doi.org/10.1007/s003390100947
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Attribution-NonCommercial-NoDerivs 2.0 Generic

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Applied Physics / A. 2001, 73(5), pp. 547-554. Available under: doi: 10.1007/s003390100947

Zusammenfassung

A PACIS (pulsed arc cluster-ion source) developed for high average cluster-ion currents is presented. The performance of the PACIS at different operational modes is described, and the suitability for cluster-deposition experiments is discussed in comparison with other cluster-ion sources. Maximum currents of mass-selected cluster ions of 3 6 nA of small Si-n (n = 4 10) clusters and 0.3 0.5 nA of large Aln +/- (n = 20 70) clusters are achieved. The mass-selected cluster ions are soft-landed on a substrate at residual kinetic energies lower than 1 eV/atom, and the samples are characterized by X-ray photoelectron spectroscopy and scanning tunneling microscopy. First results on the soft landing of magic Si-4 clusters on graphite are presented.

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530 Physik

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ISO 690KLIPP, Björn, Martin GRASS, Jürgen MÜLLER, Davor STOLCIC, Ulrich LUTZ, Gerd GANTEFÖR, Thomas SCHLENKER, Johannes BONEBERG, Paul LEIDERER, 2001. Deposition of mass-selected cluster ions using a pulsed arc cluster-ion source. In: Applied Physics / A. 2001, 73(5), pp. 547-554. Available under: doi: 10.1007/s003390100947
BibTex
@article{Klipp2001Depos-9415,
  year={2001},
  doi={10.1007/s003390100947},
  title={Deposition of mass-selected cluster ions using a pulsed arc cluster-ion source},
  number={5},
  volume={73},
  journal={Applied Physics / A},
  pages={547--554},
  author={Klipp, Björn and Grass, Martin and Müller, Jürgen and Stolcic, Davor and Lutz, Ulrich and Ganteför, Gerd and Schlenker, Thomas and Boneberg, Johannes and Leiderer, Paul}
}
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