@article{Mittmann2019Origi-53620,
  year={2019},
  doi={10.1002/admi.201900042},
  title={Origin of Ferroelectric Phase in Undoped HfO<sub>2</sub> Films Deposited by Sputtering},
  number={11},
  volume={6},
  journal={Advanced Materials Interfaces},
  author={Mittmann, Terence and Materano, Monica and Lomenzo, Patrick D. and Park, Min Hyuk and Stolichnov, Igor and Cavalieri, Matteo and Zhou, Chuanzhen and Chung, Ching‐Chang and Jones, Jacob L. and Müller, Martina},
  note={Article Number: 1900042}
}

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    <dc:creator>Park, Min Hyuk</dc:creator>
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    <dc:contributor>Zhou, Chuanzhen</dc:contributor>
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    <dc:creator>Lomenzo, Patrick D.</dc:creator>
    <dcterms:abstract xml:lang="eng">Thin film metal–insulator–metal capacitors with undoped HfO&lt;sub&gt;2&lt;/sub&gt; as the insulator are fabricated by sputtering from ceramic targets and subsequently annealed. The influence of film thickness and annealing temperature is characterized by electrical and structural methods. After annealing, the films show distinct ferroelectric properties. Grazing incidence X‐ray diffraction measurements reveal a dominant ferroelectric orthorhombic phase for thicknesses in the 10–50 nm range and a negligible non‐ferroelectric monoclinic phase fraction. Sputtering HfO&lt;sub&gt;2&lt;/sub&gt; with additional oxygen during the deposition decreases the remanent polarization. Overall, the impact of oxygen vacancies and interstitials in the HfO&lt;sub&gt;2&lt;/sub&gt; film during deposition and annealing is correlated to the phase formation process.</dcterms:abstract>
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    <dc:contributor>Lomenzo, Patrick D.</dc:contributor>
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    <dc:contributor>Müller, Martina</dc:contributor>
    <dcterms:title>Origin of Ferroelectric Phase in Undoped HfO&lt;sub&gt;2&lt;/sub&gt; Films Deposited by Sputtering</dcterms:title>
    <dc:creator>Zhou, Chuanzhen</dc:creator>
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    <dc:contributor>Jones, Jacob L.</dc:contributor>
    <dc:contributor>Materano, Monica</dc:contributor>
    <dc:creator>Jones, Jacob L.</dc:creator>
    <dc:date rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2021-05-07T07:26:32Z</dc:date>
    <dc:creator>Cavalieri, Matteo</dc:creator>
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    <dc:creator>Materano, Monica</dc:creator>
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