Publikation: A Phenomenological Model for the Contact Formation of Ag/Al Screen-Printing Pastes through SiNx:H Layers
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2014
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T. P. BOKHOVEN, , ed.. 29th European PV Solar Energy Conference and Exhibition : proceedings of the international conference held in Amsterdam, The Netherlands, 22 - 26 September 2014. München: WIP, 2014, pp. 451-454. ISBN 3-936338-34-5. Available under: doi: 10.4229/EUPVSEC20142014-2BO.3.3
Zusammenfassung
The process of contact formation of Al containing Ag screen-printing pastes to p+ emitters is investigated by an electron microscopic analysis of etched-back contacts (aqua regia and hydrofluoric acid) and polished contact cross-sections. Ag/Al contact spots grown into the Si surface are detected below inhomogeneously structured areas of the bulk contact that contain Al. In addition, Si accumulations are found in the Ag/Al phase in these parts of the contact after contact formation. It is concluded that during the firing process Ag and Al are transported from the bulk contact to the Si surface, where Ag/Al contact spots grow. The solved Si diffuses in the parts of the contact containing Al. Despite the diffusion of Si, Ag and Al, the SiNx:H layer below the inhomogeneous part of the contact and especially above the Ag/Al contact spots is not completely etched away, as is shown by EDX measurements using top view and cross-sectional samples. Based on the observations made by SEM and EDX analysis, a phenomenological model for the exchange of Si, Ag and Al through holes in the SiNx:H layer and the growth of Ag/Al contact spots below the SiNx:H layer is presented.
Zusammenfassung in einer weiteren Sprache
Fachgebiet (DDC)
530 Physik
Schlagwörter
Screen Printing, Boron Emitters, Contact Formation, Metallization, Metallisation, SEM, p+ Si
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EU PVSEC : 29th European Photovoltaic Solar Energy Conference and Exhibition, 22. Sept. 2014 - 26. Sept. 2014
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ISO 690
FRITZ, Susanne, Stefanie EBERT, Axel HERGUTH, Markus KÖNIG, Matthias HÖRTEIS, Giso HAHN, 2014. A Phenomenological Model for the Contact Formation of Ag/Al Screen-Printing Pastes through SiNx:H Layers. EU PVSEC : 29th European Photovoltaic Solar Energy Conference and Exhibition, 22. Sept. 2014 - 26. Sept. 2014. In: T. P. BOKHOVEN, , ed.. 29th European PV Solar Energy Conference and Exhibition : proceedings of the international conference held in Amsterdam, The Netherlands, 22 - 26 September 2014. München: WIP, 2014, pp. 451-454. ISBN 3-936338-34-5. Available under: doi: 10.4229/EUPVSEC20142014-2BO.3.3BibTex
@inproceedings{Fritz2014Pheno-31815,
year={2014},
doi={10.4229/EUPVSEC20142014-2BO.3.3},
title={A Phenomenological Model for the Contact Formation of Ag/Al Screen-Printing Pastes through SiN<sub>x</sub>:H Layers},
isbn={3-936338-34-5},
publisher={WIP},
address={München},
booktitle={29th European PV Solar Energy Conference and Exhibition : proceedings of the international conference held in Amsterdam, The Netherlands, 22 - 26 September 2014},
pages={451--454},
editor={T. P. Bokhoven},
author={Fritz, Susanne and Ebert, Stefanie and Herguth, Axel and König, Markus and Hörteis, Matthias and Hahn, Giso}
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