Looking Inside Micro- and Nano-Mechanical Pillar Resonators : A Picosecond Ultrasonics Approach

Stritt, Paul; Doster, Juliane; Dekorsy, Thomas; Gusev, Vitalyi; Weig, Eva M.; Hettich, Mike

Looking Inside Micro- and Nano-Mechanical Pillar Resonators : A Picosecond Ultrasonics Approach

Dateien

Stritt_2-ila8cyrymdhm5.pdfGröße: 435.29 KBDownloads: 272

Datum

2020

Autor:innen

Gusev, Vitalyi

Open Access-Veröffentlichung

Open Access Gold

Sammlungen

Physik

Publikationstyp

Zeitschriftenartikel

Publikationsstatus

Published

Erschienen in

Proceedings. MDPI AG. 2020, 56(1), 31. eISSN 2504-3900. Available under: doi: 10.3390/proceedings2020056031

Zusammenfassung

Pillar-shaped Gallium arsenide (GaAs) micromechanical resonators are fabricated, and the feasibility to measure the inside of the pillars in the axial direction with laser-induced GHz ultrasound based on picosecond ultrasonics is tested. Measurements on the pillars with head sizes in the µm range show excellent agreement with theoretical predictions.

Fachgebiet (DDC)

530 Physik

Schlagwörter

nanomechanics; elasticity; picosecond ultrasonics; nanoanalytics

Zitieren

ISO 690

STRITT, Paul, Juliane DOSTER, Thomas DEKORSY, Vitalyi GUSEV, Eva M. WEIG, Mike HETTICH, 2020. Looking Inside Micro- and Nano-Mechanical Pillar Resonators : A Picosecond Ultrasonics Approach. In: Proceedings. MDPI AG. 2020, 56(1), 31. eISSN 2504-3900. Available under: doi: 10.3390/proceedings2020056031

BibTex

@article{Stritt2020-12-28Looki-52398,
  year={2020},
  doi={10.3390/proceedings2020056031},
  title={Looking Inside Micro- and Nano-Mechanical Pillar Resonators : A Picosecond Ultrasonics Approach},
  number={1},
  volume={56},
  journal={Proceedings},
  author={Stritt, Paul and Doster, Juliane and Dekorsy, Thomas and Gusev, Vitalyi and Weig, Eva M. and Hettich, Mike},
  note={Article Number: 31}
}

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