Publikation:

Gettering efficacy of diffusion processes based on doped APCVD glasses

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2018

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http://nbn-resolving.de/urn:nbn:de:bsz:352-2-owd1rhkyugh86
DOI (zitierfähiger Link)
https://doi.org/10.1063/1.5049322
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BALLIF, Christophe, ed. and others. SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics. Melville, NY: AIP Publishing, 2018, 130003. AIP Conference Proceedings. 1999,1. ISSN 0094-243X. eISSN 1551-7616. ISBN 978-0-7354-1715-1. Available under: doi: 10.1063/1.5049322

Zusammenfassung

This work reports about the gettering efficacy of boron silicate glass (BSG) and phosphorus silicate glass (PSG) deposited by Atmospheric Pressure Chemical Vapour Deposition (APCVD) on p-type multicrystalline silicon (mc-Si). Effective minority charge carrier lifetimes (τeff) and interstitial iron concentrations ([Fei]), measured spatially resolved after APCVD PSG deposition, reveal a low temperature gettering effect prior to diffusion. The effect is also observed in samples only exposed to the PSG deposition temperature profile and thus expected to be caused by internal gettering at grain boundaries or sample surfaces. Diffusion gettering with APCVD PSG turned out to be an effective step to reduce [Fei]. In contrast, diffusion of APCVD BSG did not result in notable gettering. However, the gettering efficacy of PSG in a simultaneous co-diffusion step of PSG and BSG is sufficient to result in τeff and [Fei] values comparable to both-sided APCVD PSG diffusion. The lifetime improvements due to internal and external gettering are mostly traced back to the reduction of Fei.

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530 Physik

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SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics, 19. März 2018 - 21. März 2018, Lausanne
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ISO 690FICHTNER, Johannes, Annika ZUSCHLAG, Giso HAHN, 2018. Gettering efficacy of diffusion processes based on doped APCVD glasses. SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics. Lausanne, 19. März 2018 - 21. März 2018. In: BALLIF, Christophe, ed. and others. SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics. Melville, NY: AIP Publishing, 2018, 130003. AIP Conference Proceedings. 1999,1. ISSN 0094-243X. eISSN 1551-7616. ISBN 978-0-7354-1715-1. Available under: doi: 10.1063/1.5049322
BibTex
@inproceedings{Fichtner2018Gette-43617,
  year={2018},
  doi={10.1063/1.5049322},
  title={Gettering efficacy of diffusion processes based on doped APCVD glasses},
  number={1999,1},
  isbn={978-0-7354-1715-1},
  issn={0094-243X},
  publisher={AIP Publishing},
  address={Melville, NY},
  series={AIP Conference Proceedings},
  booktitle={SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics},
  editor={Ballif, Christophe},
  author={Fichtner, Johannes and Zuschlag, Annika and Hahn, Giso},
  note={Article Number: 130003}
}
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