Gettering efficacy of diffusion processes based on doped APCVD glasses

Lade...
Vorschaubild
Dateien
Zu diesem Dokument gibt es keine Dateien.
Datum
2018
Herausgeber:innen
Kontakt
ISSN der Zeitschrift
Electronic ISSN
ISBN
Bibliografische Daten
Verlag
Schriftenreihe
Auflagebezeichnung
DOI (zitierfähiger Link)
ArXiv-ID
Internationale Patentnummer
Angaben zur Forschungsförderung
Projekt
Open Access-Veröffentlichung
Open Access Green
Sammlungen
Core Facility der Universität Konstanz
Gesperrt bis
Titel in einer weiteren Sprache
Forschungsvorhaben
Organisationseinheiten
Zeitschriftenheft
Publikationstyp
Beitrag zu einem Konferenzband
Publikationsstatus
Published
Erschienen in
BALLIF, Christophe, ed. and others. SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics. Melville, NY: AIP Publishing, 2018, 130003. AIP Conference Proceedings. 1999,1. ISSN 0094-243X. eISSN 1551-7616. ISBN 978-0-7354-1715-1. Available under: doi: 10.1063/1.5049322
Zusammenfassung

This work reports about the gettering efficacy of boron silicate glass (BSG) and phosphorus silicate glass (PSG) deposited by Atmospheric Pressure Chemical Vapour Deposition (APCVD) on p-type multicrystalline silicon (mc-Si). Effective minority charge carrier lifetimes (τeff) and interstitial iron concentrations ([Fei]), measured spatially resolved after APCVD PSG deposition, reveal a low temperature gettering effect prior to diffusion. The effect is also observed in samples only exposed to the PSG deposition temperature profile and thus expected to be caused by internal gettering at grain boundaries or sample surfaces. Diffusion gettering with APCVD PSG turned out to be an effective step to reduce [Fei]. In contrast, diffusion of APCVD BSG did not result in notable gettering. However, the gettering efficacy of PSG in a simultaneous co-diffusion step of PSG and BSG is sufficient to result in τeff and [Fei] values comparable to both-sided APCVD PSG diffusion. The lifetime improvements due to internal and external gettering are mostly traced back to the reduction of Fei.

Zusammenfassung in einer weiteren Sprache
Fachgebiet (DDC)
530 Physik
Schlagwörter
Konferenz
SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics, 19. März 2018 - 21. März 2018, Lausanne
Rezension
undefined / . - undefined, undefined
Zitieren
ISO 690FICHTNER, Johannes, Annika ZUSCHLAG, Giso HAHN, 2018. Gettering efficacy of diffusion processes based on doped APCVD glasses. SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics. Lausanne, 19. März 2018 - 21. März 2018. In: BALLIF, Christophe, ed. and others. SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics. Melville, NY: AIP Publishing, 2018, 130003. AIP Conference Proceedings. 1999,1. ISSN 0094-243X. eISSN 1551-7616. ISBN 978-0-7354-1715-1. Available under: doi: 10.1063/1.5049322
BibTex
@inproceedings{Fichtner2018Gette-43617,
  year={2018},
  doi={10.1063/1.5049322},
  title={Gettering efficacy of diffusion processes based on doped APCVD glasses},
  number={1999,1},
  isbn={978-0-7354-1715-1},
  issn={0094-243X},
  publisher={AIP Publishing},
  address={Melville, NY},
  series={AIP Conference Proceedings},
  booktitle={SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics},
  editor={Ballif, Christophe},
  author={Fichtner, Johannes and Zuschlag, Annika and Hahn, Giso},
  note={Article Number: 130003}
}
RDF
<rdf:RDF
    xmlns:dcterms="http://purl.org/dc/terms/"
    xmlns:dc="http://purl.org/dc/elements/1.1/"
    xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#"
    xmlns:bibo="http://purl.org/ontology/bibo/"
    xmlns:dspace="http://digital-repositories.org/ontologies/dspace/0.1.0#"
    xmlns:foaf="http://xmlns.com/foaf/0.1/"
    xmlns:void="http://rdfs.org/ns/void#"
    xmlns:xsd="http://www.w3.org/2001/XMLSchema#" > 
  <rdf:Description rdf:about="https://kops.uni-konstanz.de/server/rdf/resource/123456789/43617">
    <dc:language>eng</dc:language>
    <dc:contributor>Hahn, Giso</dc:contributor>
    <dcterms:title>Gettering efficacy of diffusion processes based on doped APCVD glasses</dcterms:title>
    <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/>
    <dcterms:isPartOf rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <dcterms:abstract xml:lang="eng">This work reports about the gettering efficacy of boron silicate glass (BSG) and phosphorus silicate glass (PSG) deposited by Atmospheric Pressure Chemical Vapour Deposition (APCVD) on p-type multicrystalline silicon (mc-Si). Effective minority charge carrier lifetimes (τeff) and interstitial iron concentrations ([Fe&lt;sub&gt;i&lt;/sub&gt;]), measured spatially resolved after APCVD PSG deposition, reveal a low temperature gettering effect prior to diffusion. The effect is also observed in samples only exposed to the PSG deposition temperature profile and thus expected to be caused by internal gettering at grain boundaries or sample surfaces. Diffusion gettering with APCVD PSG turned out to be an effective step to reduce [Fe&lt;sub&gt;i&lt;/sub&gt;]. In contrast, diffusion of APCVD BSG did not result in notable gettering. However, the gettering efficacy of PSG in a simultaneous co-diffusion step of PSG and BSG is sufficient to result in τeff and [Fe&lt;sub&gt;i&lt;/sub&gt;] values comparable to both-sided APCVD PSG diffusion. The lifetime improvements due to internal and external gettering are mostly traced back to the reduction of Fe&lt;sub&gt;i&lt;/sub&gt;.</dcterms:abstract>
    <dcterms:issued>2018</dcterms:issued>
    <dc:creator>Hahn, Giso</dc:creator>
    <dcterms:available rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2018-10-25T12:44:58Z</dcterms:available>
    <dc:contributor>Fichtner, Johannes</dc:contributor>
    <dc:contributor>Zuschlag, Annika</dc:contributor>
    <dc:creator>Fichtner, Johannes</dc:creator>
    <dcterms:hasPart rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/43617/3/Fichtner_2-owd1rhkyugh86.pdf"/>
    <dc:creator>Zuschlag, Annika</dc:creator>
    <foaf:homepage rdf:resource="http://localhost:8080/"/>
    <dspace:isPartOfCollection rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <dc:rights>terms-of-use</dc:rights>
    <dc:date rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2018-10-25T12:44:58Z</dc:date>
    <dspace:hasBitstream rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/43617/3/Fichtner_2-owd1rhkyugh86.pdf"/>
    <dcterms:rights rdf:resource="https://rightsstatements.org/page/InC/1.0/"/>
    <bibo:uri rdf:resource="https://kops.uni-konstanz.de/handle/123456789/43617"/>
  </rdf:Description>
</rdf:RDF>
Interner Vermerk
xmlui.Submission.submit.DescribeStep.inputForms.label.kops_note_fromSubmitter
Kontakt
URL der Originalveröffentl.
Prüfdatum der URL
Prüfungsdatum der Dissertation
Finanzierungsart
Kommentar zur Publikation
Allianzlizenz
Corresponding Authors der Uni Konstanz vorhanden
Internationale Co-Autor:innen
Universitätsbibliographie
Ja
Begutachtet
Ja
Diese Publikation teilen