Formation of mesoporous germanium by electrochemical etching for lift-off processes

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2009
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Garralaga Rojas, Enrique
Hensen, Jan
Köstler, Wolfgang
Zimmermann, Walter
Strobl, Gerhard
Brendel, Rolf
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SINKE, W., ed. and others. The compiled state-of-the-art of PV solar technology and deployment : 24th European Photovoltaic Solar Energy Conference and Exhibition ; conference 21 - 25 September 2009, exhibition 21 - 24 September 2009, Hamburg ; proceedings ; EU PVSEC. [München]: WIP-Renewable Energies, 2009, pp. 684-687. ISBN 3-936338-25-6
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We present the formation of uniform thick mesoporous layers in Ge produced by means of electrochemical etching in highly concentrated HF electrolytes. The process is demonstrated on Ge wafers with 4 inch diameter, resulting in spatially homogenous porous layers. The formation of mesoporous Ge always takes place simultaneously with a constant dissolution of the already formed porous layer. The growth rate lies in the range of 0.071 to 2.7 nm/minute for etching current densities in a range of 0.1 to 80 mA/cm 2 , while both etch and dissolution rates lie in the range of several µm/min. We define the substrate usage as the ratio of growth rate and etch rate. It is used to determine the porous layer growth efficiency and lies in the 0.2-2% range for anodic etching experiments. If the etching bias is alternated from anodic to cathodic periodically, substrate thinning is avoided and usage increases up to 98%.

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530 Physik
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24th European Photovoltaic Solar Energy Conference and Exhibition, 21. Sept. 2009 - 25. Sept. 2009, Hamburg
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ISO 690GARRALAGA ROJAS, Enrique, Barbara TERHEIDEN, Jan HENSEN, Wolfgang KÖSTLER, Walter ZIMMERMANN, Gerhard STROBL, Heiko PLAGWITZ, Rolf BRENDEL, 2009. Formation of mesoporous germanium by electrochemical etching for lift-off processes. 24th European Photovoltaic Solar Energy Conference and Exhibition. Hamburg, 21. Sept. 2009 - 25. Sept. 2009. In: SINKE, W., ed. and others. The compiled state-of-the-art of PV solar technology and deployment : 24th European Photovoltaic Solar Energy Conference and Exhibition ; conference 21 - 25 September 2009, exhibition 21 - 24 September 2009, Hamburg ; proceedings ; EU PVSEC. [München]: WIP-Renewable Energies, 2009, pp. 684-687. ISBN 3-936338-25-6
BibTex
@inproceedings{GarralagaRojas2009Forma-31896,
  year={2009},
  title={Formation of mesoporous germanium by electrochemical etching for lift-off processes},
  isbn={3-936338-25-6},
  publisher={WIP-Renewable Energies},
  address={[München]},
  booktitle={The compiled state-of-the-art of PV solar technology and deployment : 24th European Photovoltaic Solar Energy Conference and Exhibition ; conference 21 - 25 September 2009, exhibition 21 - 24 September 2009, Hamburg ; proceedings ; EU PVSEC},
  pages={684--687},
  editor={Sinke, W.},
  author={Garralaga Rojas, Enrique and Terheiden, Barbara and Hensen, Jan and Köstler, Wolfgang and Zimmermann, Walter and Strobl, Gerhard and Plagwitz, Heiko and Brendel, Rolf}
}
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