Formation of mesoporous germanium by electrochemical etching for lift-off processes

Garralaga Rojas, Enrique; Terheiden, Barbara; Hensen, Jan; Köstler, Wolfgang; Zimmermann, Walter; Strobl, Gerhard; Plagwitz, Heiko; Brendel, Rolf

Formation of mesoporous germanium by electrochemical etching for lift-off processes

Dateien

Zu diesem Dokument gibt es keine Dateien.

Datum

2009

Autor:innen

Garralaga Rojas, Enrique

Terheiden, Barbara

Hensen, Jan

Köstler, Wolfgang

Zimmermann, Walter

Strobl, Gerhard

Plagwitz, Heiko

Brendel, Rolf

Sammlungen

Physik

Publikationstyp

Beitrag zu einem Konferenzband

Publikationsstatus

Published

Erschienen in

SINKE, W., ed. and others. The compiled state-of-the-art of PV solar technology and deployment : 24th European Photovoltaic Solar Energy Conference and Exhibition ; conference 21 - 25 September 2009, exhibition 21 - 24 September 2009, Hamburg ; proceedings ; EU PVSEC. [München]: WIP-Renewable Energies, 2009, pp. 684-687. ISBN 3-936338-25-6

Zusammenfassung in einer weiteren Sprache

We present the formation of uniform thick mesoporous layers in Ge produced by means of electrochemical etching in highly concentrated HF electrolytes. The process is demonstrated on Ge wafers with 4 inch diameter, resulting in spatially homogenous porous layers. The formation of mesoporous Ge always takes place simultaneously with a constant dissolution of the already formed porous layer. The growth rate lies in the range of 0.071 to 2.7 nm/minute for etching current densities in a range of 0.1 to 80 mA/cm 2 , while both etch and dissolution rates lie in the range of several µm/min. We define the substrate usage as the ratio of growth rate and etch rate. It is used to determine the porous layer growth efficiency and lies in the 0.2-2% range for anodic etching experiments. If the etching bias is alternated from anodic to cathodic periodically, substrate thinning is avoided and usage increases up to 98%.

Fachgebiet (DDC)

530 Physik

Konferenz

24th European Photovoltaic Solar Energy Conference and Exhibition, 21. Sept. 2009 - 25. Sept. 2009, Hamburg

Zitieren

ISO 690

GARRALAGA ROJAS, Enrique, Barbara TERHEIDEN, Jan HENSEN, Wolfgang KÖSTLER, Walter ZIMMERMANN, Gerhard STROBL, Heiko PLAGWITZ, Rolf BRENDEL, 2009. Formation of mesoporous germanium by electrochemical etching for lift-off processes. 24th European Photovoltaic Solar Energy Conference and Exhibition. Hamburg, 21. Sept. 2009 - 25. Sept. 2009. In: SINKE, W., ed. and others. The compiled state-of-the-art of PV solar technology and deployment : 24th European Photovoltaic Solar Energy Conference and Exhibition ; conference 21 - 25 September 2009, exhibition 21 - 24 September 2009, Hamburg ; proceedings ; EU PVSEC. [München]: WIP-Renewable Energies, 2009, pp. 684-687. ISBN 3-936338-25-6

BibTex

@inproceedings{GarralagaRojas2009Forma-31896,
  year={2009},
  title={Formation of mesoporous germanium by electrochemical etching for lift-off processes},
  isbn={3-936338-25-6},
  publisher={WIP-Renewable Energies},
  address={[München]},
  booktitle={The compiled state-of-the-art of PV solar technology and deployment : 24th European Photovoltaic Solar Energy Conference and Exhibition ; conference 21 - 25 September 2009, exhibition 21 - 24 September 2009, Hamburg ; proceedings ; EU PVSEC},
  pages={684--687},
  editor={Sinke, W.},
  author={Garralaga Rojas, Enrique and Terheiden, Barbara and Hensen, Jan and Köstler, Wolfgang and Zimmermann, Walter and Strobl, Gerhard and Plagwitz, Heiko and Brendel, Rolf}
}

RDF

<rdf:RDF
    xmlns:dcterms="http://purl.org/dc/terms/"
    xmlns:dc="http://purl.org/dc/elements/1.1/"
    xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#"
    xmlns:bibo="http://purl.org/ontology/bibo/"
    xmlns:dspace="http://digital-repositories.org/ontologies/dspace/0.1.0#"
    xmlns:foaf="http://xmlns.com/foaf/0.1/"
    xmlns:void="http://rdfs.org/ns/void#"
    xmlns:xsd="http://www.w3.org/2001/XMLSchema#" > 
  <rdf:Description rdf:about="https://kops.uni-konstanz.de/server/rdf/resource/123456789/31896">
    <dc:contributor>Zimmermann, Walter</dc:contributor>
    <dc:creator>Plagwitz, Heiko</dc:creator>
    <dc:creator>Terheiden, Barbara</dc:creator>
    <dc:language>eng</dc:language>
    <dc:contributor>Brendel, Rolf</dc:contributor>
    <dc:date rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2015-10-05T09:32:15Z</dc:date>
    <dc:creator>Köstler, Wolfgang</dc:creator>
    <dcterms:available rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2015-10-05T09:32:15Z</dcterms:available>
    <dc:creator>Strobl, Gerhard</dc:creator>
    <dcterms:title>Formation of mesoporous germanium by electrochemical etching for lift-off processes</dcterms:title>
    <dc:contributor>Strobl, Gerhard</dc:contributor>
    <dc:contributor>Köstler, Wolfgang</dc:contributor>
    <foaf:homepage rdf:resource="http://localhost:8080/"/>
    <dcterms:isPartOf rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <dc:contributor>Garralaga Rojas, Enrique</dc:contributor>
    <dc:contributor>Terheiden, Barbara</dc:contributor>
    <dc:creator>Hensen, Jan</dc:creator>
    <dspace:isPartOfCollection rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <dc:creator>Brendel, Rolf</dc:creator>
    <dc:creator>Zimmermann, Walter</dc:creator>
    <dc:creator>Garralaga Rojas, Enrique</dc:creator>
    <bibo:uri rdf:resource="http://kops.uni-konstanz.de/handle/123456789/31896"/>
    <dcterms:issued>2009</dcterms:issued>
    <dc:contributor>Plagwitz, Heiko</dc:contributor>
    <dc:contributor>Hensen, Jan</dc:contributor>
    <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/>
  </rdf:Description>
</rdf:RDF>

Universitätsbibliographie

Ja