Publikation: Optical temperature measurements on thin freestanding silicon membranes
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Review of Scientific Instruments. 2010, 81(11), 114903. ISSN 0034-6748. eISSN 1089-7623. Available under: doi: 10.1063/1.3499503
Zusammenfassung
We report on a contactless, all-optical method to derive thermal properties of 340 nm thin, 640×640 μm2 wide, freestanding silicon membranes. Exploiting the temperature dependent optical transmissivity of 4×10−3/K between 300 and 470 K, we are able to measure the temperature of the membrane with millikelvin thermal, micrometer lateral, and nanosecond temporal resolution. Experiments such as the decay of a transient thermal grating with spacings between 5 and 30 μm, measured in first order of diffraction, as well as heat diffusion in a statically heated membrane are reported in this letter. For the latter case an example of a nanostructured membrane by means of focused ion beam milling is given.
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SCHMOTZ, Markus, Patrick BOOKJANS, Elke SCHEER, Paul LEIDERER, 2010. Optical temperature measurements on thin freestanding silicon membranes. In: Review of Scientific Instruments. 2010, 81(11), 114903. ISSN 0034-6748. eISSN 1089-7623. Available under: doi: 10.1063/1.3499503BibTex
@article{Schmotz2010-11Optic-14138,
year={2010},
doi={10.1063/1.3499503},
title={Optical temperature measurements on thin freestanding silicon membranes},
number={11},
volume={81},
issn={0034-6748},
journal={Review of Scientific Instruments},
author={Schmotz, Markus and Bookjans, Patrick and Scheer, Elke and Leiderer, Paul},
note={Article Number: 114903}
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<dcterms:abstract xml:lang="eng">We report on a contactless, all-optical method to derive thermal properties of 340 nm thin, 640×640 μm2 wide, freestanding silicon membranes. Exploiting the temperature dependent optical transmissivity of 4×10−3/K between 300 and 470 K, we are able to measure the temperature of the membrane with millikelvin thermal, micrometer lateral, and nanosecond temporal resolution. Experiments such as the decay of a transient thermal grating with spacings between 5 and 30 μm, measured in first order of diffraction, as well as heat diffusion in a statically heated membrane are reported in this letter. For the latter case an example of a nanostructured membrane by means of focused ion beam milling is given.</dcterms:abstract>
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