Optical temperature measurements on thin freestanding silicon membranes

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Review of Scientific Instruments. 2010, 81(11), 114903. ISSN 0034-6748. eISSN 1089-7623. Available under: doi: 10.1063/1.3499503
Zusammenfassung

We report on a contactless, all-optical method to derive thermal properties of 340 nm thin, 640×640 μm2 wide, freestanding silicon membranes. Exploiting the temperature dependent optical transmissivity of 4×10−3/K between 300 and 470 K, we are able to measure the temperature of the membrane with millikelvin thermal, micrometer lateral, and nanosecond temporal resolution. Experiments such as the decay of a transient thermal grating with spacings between 5 and 30 μm, measured in first order of diffraction, as well as heat diffusion in a statically heated membrane are reported in this letter. For the latter case an example of a nanostructured membrane by means of focused ion beam milling is given.

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ISO 690SCHMOTZ, Markus, Patrick BOOKJANS, Elke SCHEER, Paul LEIDERER, 2010. Optical temperature measurements on thin freestanding silicon membranes. In: Review of Scientific Instruments. 2010, 81(11), 114903. ISSN 0034-6748. eISSN 1089-7623. Available under: doi: 10.1063/1.3499503
BibTex
@article{Schmotz2010-11Optic-14138,
  year={2010},
  doi={10.1063/1.3499503},
  title={Optical temperature measurements on thin freestanding silicon membranes},
  number={11},
  volume={81},
  issn={0034-6748},
  journal={Review of Scientific Instruments},
  author={Schmotz, Markus and Bookjans, Patrick and Scheer, Elke and Leiderer, Paul},
  note={Article Number: 114903}
}
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