@inproceedings{Held2008Syste-59382,
  year={2008},
  doi={10.1557/PROC-1052-DD07-07},
  title={Systematic characterization of DRIE-based fabrication process of silicon microneedles},
  number={1052},
  isbn={978-1-55899-990-9},
  issn={0272-9172},
  publisher={MRS},
  address={Warrendale, Pa.},
  series={Materials Research Society symposium proceedings},
  booktitle={Microelectromechanical systems - materials and devices : symposium held November 26 - 28, 2007, San Francisco, California, U.S.A. ; [Symposium DD, "Microelectromechanical Systems - Materials and Devices" was held ... at the 2007 MRS fall meeting]},
  pages={271--276},
  editor={LaVan, David A.},
  author={Held, Jochen and Gaspar, Joao and Ruther, Patrick and Hagner, Matthias and Cismak, Andreas and Heilmann, Andreas and Paul, Oliver}
}

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