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Systematic characterization of DRIE-based fabrication process of silicon microneedles

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2008

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Held, Jochen
Gaspar, Joao
Ruther, Patrick
Cismak, Andreas
Heilmann, Andreas
Paul, Oliver

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https://doi.org/10.1557/PROC-1052-DD07-07
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LAVAN, David A., ed. and others. Microelectromechanical systems - materials and devices : symposium held November 26 - 28, 2007, San Francisco, California, U.S.A. ; [Symposium DD, "Microelectromechanical Systems - Materials and Devices" was held ... at the 2007 MRS fall meeting]. Warrendale, Pa.: MRS, 2008, pp. 271-276. Materials Research Society symposium proceedings. 1052. ISSN 0272-9172. eISSN 1946-4274. ISBN 978-1-55899-990-9. Available under: doi: 10.1557/PROC-1052-DD07-07

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530 Physik

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Symposium DD, "Microelectromechanical Systems - Materials and Devices", 26. Nov. 2007 - 28. Nov. 2007, San Francisco, California
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ISO 690HELD, Jochen, Joao GASPAR, Patrick RUTHER, Matthias HAGNER, Andreas CISMAK, Andreas HEILMANN, Oliver PAUL, 2008. Systematic characterization of DRIE-based fabrication process of silicon microneedles. Symposium DD, "Microelectromechanical Systems - Materials and Devices". San Francisco, California, 26. Nov. 2007 - 28. Nov. 2007. In: LAVAN, David A., ed. and others. Microelectromechanical systems - materials and devices : symposium held November 26 - 28, 2007, San Francisco, California, U.S.A. ; [Symposium DD, "Microelectromechanical Systems - Materials and Devices" was held ... at the 2007 MRS fall meeting]. Warrendale, Pa.: MRS, 2008, pp. 271-276. Materials Research Society symposium proceedings. 1052. ISSN 0272-9172. eISSN 1946-4274. ISBN 978-1-55899-990-9. Available under: doi: 10.1557/PROC-1052-DD07-07
BibTex
@inproceedings{Held2008Syste-59382,
  year={2008},
  doi={10.1557/PROC-1052-DD07-07},
  title={Systematic characterization of DRIE-based fabrication process of silicon microneedles},
  number={1052},
  isbn={978-1-55899-990-9},
  issn={0272-9172},
  publisher={MRS},
  address={Warrendale, Pa.},
  series={Materials Research Society symposium proceedings},
  booktitle={Microelectromechanical systems - materials and devices : symposium held November 26 - 28, 2007, San Francisco, California, U.S.A. ; [Symposium DD, "Microelectromechanical Systems - Materials and Devices" was held ... at the 2007 MRS fall meeting]},
  pages={271--276},
  editor={LaVan, David A.},
  author={Held, Jochen and Gaspar, Joao and Ruther, Patrick and Hagner, Matthias and Cismak, Andreas and Heilmann, Andreas and Paul, Oliver}
}
RDF
<rdf:RDF
    xmlns:dcterms="http://purl.org/dc/terms/"
    xmlns:dc="http://purl.org/dc/elements/1.1/"
    xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#"
    xmlns:bibo="http://purl.org/ontology/bibo/"
    xmlns:dspace="http://digital-repositories.org/ontologies/dspace/0.1.0#"
    xmlns:foaf="http://xmlns.com/foaf/0.1/"
    xmlns:void="http://rdfs.org/ns/void#"
    xmlns:xsd="http://www.w3.org/2001/XMLSchema#" > 
  <rdf:Description rdf:about="https://kops.uni-konstanz.de/server/rdf/resource/123456789/59382">
    <dc:contributor>Paul, Oliver</dc:contributor>
    <dc:contributor>Cismak, Andreas</dc:contributor>
    <dc:creator>Hagner, Matthias</dc:creator>
    <dcterms:title>Systematic characterization of DRIE-based fabrication process of silicon microneedles</dcterms:title>
    <foaf:homepage rdf:resource="http://localhost:8080/"/>
    <dc:creator>Held, Jochen</dc:creator>
    <dcterms:isPartOf rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <dc:creator>Heilmann, Andreas</dc:creator>
    <dc:contributor>Ruther, Patrick</dc:contributor>
    <dcterms:available rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2022-12-02T10:12:18Z</dcterms:available>
    <dc:contributor>Gaspar, Joao</dc:contributor>
    <bibo:uri rdf:resource="https://kops.uni-konstanz.de/handle/123456789/59382"/>
    <dc:contributor>Hagner, Matthias</dc:contributor>
    <dcterms:issued>2008</dcterms:issued>
    <dc:contributor>Heilmann, Andreas</dc:contributor>
    <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/>
    <dc:creator>Cismak, Andreas</dc:creator>
    <dspace:isPartOfCollection rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <dc:date rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2022-12-02T10:12:18Z</dc:date>
    <dc:creator>Gaspar, Joao</dc:creator>
    <dc:creator>Ruther, Patrick</dc:creator>
    <dc:contributor>Held, Jochen</dc:contributor>
    <dc:language>eng</dc:language>
    <dc:creator>Paul, Oliver</dc:creator>
  </rdf:Description>
</rdf:RDF>

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xmlui.Submission.submit.DescribeStep.inputForms.label.kops_note_fromSubmitter

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