@inproceedings{Wagner2012Analy-49365,
  year={2012},
  doi={10.1109/PVSC.2012.6317625},
  title={Analyzing emitter dopant inhomogeneities at textured Si surfaces by using 3D process and device simulations in combination with SEM imaging},
  isbn={978-1-4673-0064-3},
  publisher={IEEE},
  address={Piscataway, NJ},
  booktitle={2012 38th IEEE Photovoltaic Specialists Conference},
  pages={000313--000316},
  author={Wagner, Hannes and Steingrube, Silke and Wolpensinger, Bettina and Dastgheib-Shirazi, Amir and Chen, Renyu and Dunham, Scott T. and Altermatt, Pietro P.}
}

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