Gettering efficacy of an APCVD glasses based stacked co-diffusion for bifacial mc-Si PERT solar cells

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POORTMANS, Jef, ed. and others. SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics : 8-10 April 2019, Leuven, Belgium. Melville, New York: AIP Publishing, 2019, 140002. AIP Conference Proceedings. 2147,1. eISSN 0094-243X. ISBN 978-0-7354-1892-9. Available under: doi: 10.1063/1.5123889
Zusammenfassung

Gettering of impurities is an important task in p-type mc-Si solar cell production. Phosphorus diffusion via POCl3 is currently the most common way to achieve this. We report about the gettering efficacy of a co-diffusion in which POCl3 is not used. Phosphorus and boron containing glasses are both deposited prior to the diffusion via atmospheric pressure chemical vapor deposition (APCVD). The presented APCVD glasses based co-diffusion allows a loading without spacing and therefore has the potential for a very high throughput. As we demonstrate in this work, the overall gettering efficacy in different kinds of stacks is similar to the gettering efficacy in non-stacked APCVD glasses based diffusions. The reduction of interstitial iron in the analyzed lifetime samples is ascribed to phosphorus diffusion gettering and works in stacks just as well.

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530 Physik
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SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics, 8. Apr. 2019 - 10. Apr. 2019, Leuven, Belgium
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ISO 690FICHTNER, Johannes, Annika ZUSCHLAG, Giso HAHN, 2019. Gettering efficacy of an APCVD glasses based stacked co-diffusion for bifacial mc-Si PERT solar cells. SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics. Leuven, Belgium, 8. Apr. 2019 - 10. Apr. 2019. In: POORTMANS, Jef, ed. and others. SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics : 8-10 April 2019, Leuven, Belgium. Melville, New York: AIP Publishing, 2019, 140002. AIP Conference Proceedings. 2147,1. eISSN 0094-243X. ISBN 978-0-7354-1892-9. Available under: doi: 10.1063/1.5123889
BibTex
@inproceedings{Fichtner2019Gette-46842,
  year={2019},
  doi={10.1063/1.5123889},
  title={Gettering efficacy of an APCVD glasses based stacked co-diffusion for bifacial mc-Si PERT solar cells},
  number={2147,1},
  isbn={978-0-7354-1892-9},
  publisher={AIP Publishing},
  address={Melville, New York},
  series={AIP Conference Proceedings},
  booktitle={SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics : 8-10 April 2019, Leuven, Belgium},
  editor={Poortmans, Jef},
  author={Fichtner, Johannes and Zuschlag, Annika and Hahn, Giso},
  note={Article Number: 140002}
}
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