Parametric Oscillation, Frequency Mixing, and Injection Locking of Strongly Coupled Nanomechanical Resonator Modes

Abstract

We study locking phenomena of two strongly coupled, high quality factor nanomechanical resonator modes to a common parametric drive at a single drive frequency in different parametric driving regimes. By controlled dielectric gradient forces we tune the resonance frequencies of the flexural in-plane and out-of-plane oscillation of the high stress silicon nitride string through their mutual avoided crossing. For the case of the strong common parametric drive signal-idler generation via nondegenerate parametric two-mode oscillation is observed. Broadband frequency tuning of the very narrow linewidth signal and idler resonances is demonstrated. When the resonance frequencies of the signal and idler get closer to each other, partial injection locking, injection pulling, and complete injection locking to half of the drive frequency occurs depending on the pump strength. Furthermore, satellite resonances, symmetrically offset from the signal and idler by their beat note, are observed, which can be attributed to degenerate four-wave mixing in the highly nonlinear mechanical oscillations.