@incollection{Scheer2012Metal-52436,
  year={2012},
  title={Metal Interconnects},
  edition={3., completely rev. and enlarged ed.},
  isbn={978-3-527-40927-3},
  publisher={Wiley VCH},
  address={Weinheim},
  booktitle={Nanoelectronics and information technology : advanced electronic materials and novel devices},
  pages={765--776},
  editor={Waser, Rainer},
  author={Scheer, Elke}
}

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