Publikation: Enhanced positioning precision and in situ macroscopic contacts for shadow-evaporated nanostructures
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2015
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Stöffler, Dominik
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Journal of Vacuum Science & Technology B : Nanotechnology and Microelectronics : Materials, Processing, Measurement, and Phenomena. 2015, 33(1), 013201. ISSN 2166-2746. eISSN 2166-2754. Available under: doi: 10.1116/1.4905092
Zusammenfassung
The authors present the design of a modular sample holder that offers the possibility of in situ fabrication of metallic nanostructures under ultrahigh vacuum. One of the crucial points is to bridge the gap between the macroscopic leads and the nanostructure itself. This problem is solved by using a set of two different masks. For a precise alignment of the two masks, a magnetic tripod connection system has been developed. With this new system, an alignment precision of 26 lm is obtained. As a result of the fabrication in ultrahigh vacuum, the nanostructures will be accessible to scanning probe techniques without surface contamination. First results show that electrical measurements are indeed possible.
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530 Physik
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STÖFFLER, Dominik, Regina HOFFMANN-VOGEL, 2015. Enhanced positioning precision and in situ macroscopic contacts for shadow-evaporated nanostructures. In: Journal of Vacuum Science & Technology B : Nanotechnology and Microelectronics : Materials, Processing, Measurement, and Phenomena. 2015, 33(1), 013201. ISSN 2166-2746. eISSN 2166-2754. Available under: doi: 10.1116/1.4905092BibTex
@article{Stoffler2015-01Enhan-45303,
year={2015},
doi={10.1116/1.4905092},
title={Enhanced positioning precision and in situ macroscopic contacts for shadow-evaporated nanostructures},
number={1},
volume={33},
issn={2166-2746},
journal={Journal of Vacuum Science & Technology B : Nanotechnology and Microelectronics : Materials, Processing, Measurement, and Phenomena},
author={Stöffler, Dominik and Hoffmann-Vogel, Regina},
note={Article Number: 013201}
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