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Thermally Stable Surface Passivation by A-Si:H / SiN Double Layers for Crystalline Silicon Solar Cells

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2008

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Gatz, Sebastian
Altermatt, Pietro P.
Brendel, Rolf

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LINCOT, D., ed. and others. The compiled state-of-the-art of PV solar technology and deployment : 23rd European Photovoltaic Solar Energy Conference, EU PVSEC ; proceedings of the international conference, held in Valencia, Spain, 1 - 5 September 2008. [München]: WIP-Renewable Energies, 2008, pp. 1033-1035. ISBN 3-936338-24-8. Available under: doi: 10.4229/23rdEUPVSEC2008-2AO.2.5

Zusammenfassung

The thermal stability of the amorphous silicon / silicon nitride double layer surface passivation on p-type crystalline silicon surfaces is investigated for various deposition temperatures of the silicon nitride capping layer. An increase of deposition temperature from 300°C to 400°C results in a significant improvement of the thermal stability of the surface passivation. The minimum surface recombination velocity achieved on p-type (1.5 cm) silicon wafers is (0.75 ± 0.6) cm/s and remains at (10 ± 0.5) cm/s even after 30 min annealing at 500°C.

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530 Physik

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23rd European Photovoltaic Solar Energy Conference and Exhibition, 1. Sept. 2008 - 5. Sept. 2008, Valencia
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ISO 690GATZ, Sebastian, Heiko PLAGWITZ, Pietro P. ALTERMATT, Barbara TERHEIDEN, Rolf BRENDEL, 2008. Thermally Stable Surface Passivation by A-Si:H / SiN Double Layers for Crystalline Silicon Solar Cells. 23rd European Photovoltaic Solar Energy Conference and Exhibition. Valencia, 1. Sept. 2008 - 5. Sept. 2008. In: LINCOT, D., ed. and others. The compiled state-of-the-art of PV solar technology and deployment : 23rd European Photovoltaic Solar Energy Conference, EU PVSEC ; proceedings of the international conference, held in Valencia, Spain, 1 - 5 September 2008. [München]: WIP-Renewable Energies, 2008, pp. 1033-1035. ISBN 3-936338-24-8. Available under: doi: 10.4229/23rdEUPVSEC2008-2AO.2.5
BibTex
@inproceedings{Gatz2008Therm-32069,
  year={2008},
  doi={10.4229/23rdEUPVSEC2008-2AO.2.5},
  title={Thermally Stable Surface Passivation by A-Si:H / SiN Double Layers for Crystalline Silicon Solar Cells},
  isbn={3-936338-24-8},
  publisher={WIP-Renewable Energies},
  address={[München]},
  booktitle={The compiled state-of-the-art of PV solar technology and deployment : 23rd European Photovoltaic Solar Energy Conference, EU PVSEC ; proceedings of the international conference, held in Valencia, Spain, 1 - 5 September 2008},
  pages={1033--1035},
  editor={Lincot, D.},
  author={Gatz, Sebastian and Plagwitz, Heiko and Altermatt, Pietro P. and Terheiden, Barbara and Brendel, Rolf}
}
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