Nanoresolution patterning of hydrogenated graphene by electron beam induced C–H dissociation

Liu, Jiangwei; Chen, Song; Papadakis, Raffaello; Li, Hu

Nanoresolution patterning of hydrogenated graphene by electron beam induced C–H dissociation

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Date

2018

Authors

Liu, Jiangwei

Chen, Song

Papadakis, Raffaello

Li, Hu

DOI (citable link)

10.1088/1361-6528/aad651

Collections

Chemie

Publication type

Journal article

Publication status

Published

Published in

Nanotechnology ; 29 (2018), 41. - 415304. - ISSN 0957-4484. - eISSN 1361-6528

Abstract

Direct writing of semi-conductive or insulative nanopatterns on graphene surfaces is one of the major challenges in the application of graphene in flexible and transparent electronic devices. Here, we demonstrate that nanoresolution patterning on hydrogenated graphene can be approached by using electron beam induced C–H dissociation when the electron accelerating voltage is beyond a critical voltage of 3 kV. The resolution of the patterning reaches 18 nm and remains constant as the accelerating voltage is beyond 15 kV. The origin of the nanoresolution pattering as well as the dependence of the resolution on voltage in this technique is well explained by studying the cross-section of the C–H bond under electron impact. This work constitutes a new approach to fabricate graphene-based electronic nanodevices, with the reduced hydrogenated graphene channel utilized as conductive or semi-conductive counterpart in the structure.

Subject (DDC)

540 Chemistry

Cite This

ISO 690

LIU, Jiangwei, Song CHEN, Raffaello PAPADAKIS, Hu LI, 2018. Nanoresolution patterning of hydrogenated graphene by electron beam induced C–H dissociation. In: Nanotechnology. 29(41), 415304. ISSN 0957-4484. eISSN 1361-6528. Available under: doi: 10.1088/1361-6528/aad651

BibTex

@article{Liu2018-10-12Nanor-43283,
  year={2018},
  doi={10.1088/1361-6528/aad651},
  title={Nanoresolution patterning of hydrogenated graphene by electron beam induced C–H dissociation},
  number={41},
  volume={29},
  issn={0957-4484},
  journal={Nanotechnology},
  author={Liu, Jiangwei and Chen, Song and Papadakis, Raffaello and Li, Hu},
  note={Article Number: 415304}
}

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Refereed

Yes