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Fabry-Pérot sensors : microfluidic channels and transparent membranes

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2011

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Gervinskas, Gediminas
Trocha, Philipp
Buividas, Ričardas
Day, Daniel J.
Juodkazis, Saulius

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https://doi.org/10.1117/12.904898
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JUODKAZIS, Saulius, ed. and others. Smart nano-micro materials and devices : 5 - 7 December 2011, Hawthorn, Australia ; [part of SPIE smart materials, nano+micro-smart systems]. Bellingham, Wash.: SPIE, 2011, 82043Q. Proceedings of SPIE. 8204. eISSN 0277-786X. ISBN 978-0-8194-8845-9. Available under: doi: 10.1117/12.904898

Zusammenfassung

We present two realizations of a highly sensitive platform useful in environmental sensing and diagnostics - a Fabry-Perot (FP) interferometer - (i) a pair of semi-transparent mirrors integrated into a microfluidic channel and (ii) a silicon membrane of sub-micrometer thickness. Simple way to make microfluidic channels by (i) hot-embossing into a sheet of technical grade PMMA and (ii) double-sided tape fixed glass with Au-coated mirrors are presented. By changing the thickness of the Au coating, the roughness and porosity of mirror surface is controlled. In turn, this provides a method to tune finesse of the FP cavity to monitor solutions flowwing between the FP-mirrors. In case of silicon, the FP cavity is formed by coating two sides of a Si-membrane. These two different approaches to harness a high sensitivity of the FP interferometry are proposed: changes of FP cavity caused by materials in the channel can be monitored, while the coated membrane is used to monitor the effects which are induced by membrane's ambiance. The finesse of the FP cavity is optimized for the maximum spectral sensitivity at the cost of transmitted light intensity in case of microfluidic channel and silicon membrane. Via optimization of the finesse (in the range 2-5) and overall transmission of a FP-pair (20-60%) practical solutions are proposed for spectral sensing of (i) refractive index and mechanical channel width's changes in a microfluidic channel as well as (ii) temperature changes of membrane's environment. Asymmetric thickness of the FP mirrors can be used to optimize sensitivity.

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530 Physik

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Smart nano-micro materials and devices, 5. Dez. 2011 - 7. Dez. 2011, Hawthorn, Australia
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ISO 690GERVINSKAS, Gediminas, Philipp TROCHA, Ričardas BUIVIDAS, Daniel J. DAY, Elke SCHEER, Paul LEIDERER, Saulius JUODKAZIS, 2011. Fabry-Pérot sensors : microfluidic channels and transparent membranes. Smart nano-micro materials and devices. Hawthorn, Australia, 5. Dez. 2011 - 7. Dez. 2011. In: JUODKAZIS, Saulius, ed. and others. Smart nano-micro materials and devices : 5 - 7 December 2011, Hawthorn, Australia ; [part of SPIE smart materials, nano+micro-smart systems]. Bellingham, Wash.: SPIE, 2011, 82043Q. Proceedings of SPIE. 8204. eISSN 0277-786X. ISBN 978-0-8194-8845-9. Available under: doi: 10.1117/12.904898
BibTex
@inproceedings{Gervinskas2011-12-23Fabry-51232,
  year={2011},
  doi={10.1117/12.904898},
  title={Fabry-Pérot sensors : microfluidic channels and transparent membranes},
  number={8204},
  isbn={978-0-8194-8845-9},
  publisher={SPIE},
  address={Bellingham, Wash.},
  series={Proceedings of SPIE},
  booktitle={Smart nano-micro materials and devices : 5 - 7 December 2011, Hawthorn, Australia ; [part of SPIE smart materials, nano+micro-smart systems]},
  editor={Juodkazis, Saulius},
  author={Gervinskas, Gediminas and Trocha, Philipp and Buividas, Ričardas and Day, Daniel J. and Scheer, Elke and Leiderer, Paul and Juodkazis, Saulius},
  note={Article Number: 82043Q}
}
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