@inproceedings{Behnken2004Influ-31378,
  year={2004},
  title={Influence of saw damage etching on the mechanical stability of multi-crystalline wafers},
  isbn={3-936338-15-9},
  publisher={WIP-Munich},
  address={München},
  booktitle={Nineteenth European Photovoltaic Solar Energy Conference : proceedings of the international conference held in Paris, France, 7 - 11 June 2004},
  pages={1123--1126},
  editor={Hoffmann, W.},
  author={Behnken, Herfried and Tiefers, Rüdiger and Krühler, Wolfgang and Froitzheim, Armin and Hahn, Giso and Franke, Dieter}
}

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