Publikation: Chemical Stability of IrO2 Top Electrodes in Ferroelectric Hf0.5Zr0.5O2‐based MIM Structures : The Impact of Annealing Gas
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2021
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Baumgarten, Lutz
Mittmann, Terence
Matveyev, Yury
Schlueter, Christoph
Mikolajick, Thomas
Schroeder, Uwe
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physica status solidi (RRL) : Rapid Research Letters. Wiley. 2021, 15(5), 2100027. ISSN 1862-6254. eISSN 1862-6270. Available under: doi: 10.1002/pssr.202100027
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SZYJKA, Thomas, Lutz BAUMGARTEN, Terence MITTMANN, Yury MATVEYEV, Christoph SCHLUETER, Thomas MIKOLAJICK, Uwe SCHROEDER, Martina MÜLLER, 2021. Chemical Stability of IrO2 Top Electrodes in Ferroelectric Hf0.5Zr0.5O2‐based MIM Structures : The Impact of Annealing Gas. In: physica status solidi (RRL) : Rapid Research Letters. Wiley. 2021, 15(5), 2100027. ISSN 1862-6254. eISSN 1862-6270. Available under: doi: 10.1002/pssr.202100027BibTex
@article{Szyjka2021-05Chemi-53094, year={2021}, doi={10.1002/pssr.202100027}, title={Chemical Stability of IrO<sub>2</sub> Top Electrodes in Ferroelectric Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub>‐based MIM Structures : The Impact of Annealing Gas}, number={5}, volume={15}, issn={1862-6254}, journal={physica status solidi (RRL) : Rapid Research Letters}, author={Szyjka, Thomas and Baumgarten, Lutz and Mittmann, Terence and Matveyev, Yury and Schlueter, Christoph and Mikolajick, Thomas and Schroeder, Uwe and Müller, Martina}, note={Article Number: 2100027} }
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