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Investigation on the influence of illumination on the diffusion of hydrogen into crystalline silicon

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2018

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https://doi.org/10.1063/1.5049328
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BALLIF, Christophe, ed. and others. SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics. Melville, NY: AIP Publishing, 2018, 130009. AIP Conference Proceedings. 1999,1. ISSN 0094-243X. eISSN 0094-243X. ISBN 978-0-7354-1715-1. Available under: doi: 10.1063/1.5049328

Zusammenfassung

Hydrogen in-diffusion into highly boron-doped crystalline silicon from a remote hydrogen plasma with and without illumination (excess carrier injection) is investigated in the temperature range 60-200°C by means of ECV relying on the deactivation of acceptors by formation of acceptor-hydrogen pairs. Diffusivity is analyzed via the Boltzmann-Matano approach. Effective diffusivity of hydrogen under the investigated conditions is found to be strongly trap-limited. Furthermore, it is found that illumination has a decelerating influence on the effective diffusivity of hydrogen probably due to the enhancement or suppression of diffusion of differently charged hydrogen species by the electric field of the high-low junction formed by the passivation of boron in the diffused region.

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530 Physik

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SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics, 19. März 2018 - 21. März 2018, Lausanne
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ISO 690KELLER, Philipp, Axel HERGUTH, 2018. Investigation on the influence of illumination on the diffusion of hydrogen into crystalline silicon. SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics. Lausanne, 19. März 2018 - 21. März 2018. In: BALLIF, Christophe, ed. and others. SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics. Melville, NY: AIP Publishing, 2018, 130009. AIP Conference Proceedings. 1999,1. ISSN 0094-243X. eISSN 0094-243X. ISBN 978-0-7354-1715-1. Available under: doi: 10.1063/1.5049328
BibTex
@inproceedings{Keller2018Inves-46512,
  year={2018},
  doi={10.1063/1.5049328},
  title={Investigation on the influence of illumination on the diffusion of hydrogen into crystalline silicon},
  number={1999,1},
  isbn={978-0-7354-1715-1},
  issn={0094-243X},
  publisher={AIP Publishing},
  address={Melville, NY},
  series={AIP Conference Proceedings},
  booktitle={SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics},
  editor={Ballif, Christophe},
  author={Keller, Philipp and Herguth, Axel},
  note={Article Number: 130009}
}
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