@inproceedings{Hahn2005Hydro-31355,
  year={2005},
  title={Hydrogen kinetics in crystalline silicon : PECVD SiN studies in mc and Cz silicon},
  isbn={3-936338-19-1},
  publisher={WIP Renewable Energies},
  address={München},
  booktitle={20th European Photovoltaic Solar Energy Conference : proceedings of the international conference held in Barcelona, Spain, 6 - 10 June 2005},
  pages={717--720},
  author={Hahn, Giso and Schönecker, Axel and Burgers, Antonius R. and Ginige, Ravine and Cherkaoui, Karim and Karg, Dieter}
}

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