Optical transmission and laser structuring of silicon membranes

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Scheer_Optics_Express_2009.pdf
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2009
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Juodkazis, Saulius
Nishi, Yasufumi
Misawa, Hiroaki
Mizeikis, Vygantas
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Optics express. 2009, 17(17), pp. 15308-15317. Available under: doi: 10.1364/OE.17.015308
Zusammenfassung

The optical linear and nonlinear properties of » 340-nm thick Si membranes were investigated. The investigation included both experiments in which the reflection and transmission from the membranes were measured, and finite differences time domain simulations. The linear optical transmission of the Si membranes can be controlled by changing the thickness of a thermally grown oxide on the membrane. Illumination of the membranes with high levels of irradiation leads to optical modifications that are consistent with the formation of amorphous silicon and dielectric breakdown. When irradiated under conditions where dielectric breakdown occurs, the membranes can be ablated in a well-controlled manner. Laser micro-structuring of the membranes by ablation was carried out to make micrometer-sized holes by focused fs-pulses. Ns-pulses were also used to fabricate arrays of holes by proximity-ablation of a closely-packed pattern of colloidal particles.

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ISO 690JUODKAZIS, Saulius, Yasufumi NISHI, Hiroaki MISAWA, Vygantas MIZEIKIS, Olivier SCHECKER, Reimar WAITZ, Paul LEIDERER, Elke SCHEER, 2009. Optical transmission and laser structuring of silicon membranes. In: Optics express. 2009, 17(17), pp. 15308-15317. Available under: doi: 10.1364/OE.17.015308
BibTex
@article{Juodkazis2009Optic-5145,
  year={2009},
  doi={10.1364/OE.17.015308},
  title={Optical transmission and laser structuring of silicon membranes},
  number={17},
  volume={17},
  journal={Optics express},
  pages={15308--15317},
  author={Juodkazis, Saulius and Nishi, Yasufumi and Misawa, Hiroaki and Mizeikis, Vygantas and Schecker, Olivier and Waitz, Reimar and Leiderer, Paul and Scheer, Elke}
}
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