Publikation:

Process influences during atmospheric pressure chemical vapor deposition of passivating Si-based doping glasses for PERT solar concepts

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2020

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http://nbn-resolving.de/urn:nbn:de:bsz:352-2-yoyur42msctd2
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Published

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37th European Photovoltaic Solar Energy Conference and Exhibition (EUPVSEC) : Proceedings. München: WIP, 2020, pp. 214-217. eISSN 2196-100X. ISBN 3-936338-73-6

Zusammenfassung

PERT (Passivated Emitter, Rear Totally diffused) solar cells based on n-type crystalline Si are influencing the commercial solar cell market. Due to a highly competitive market, a low-cost production is favorable. Atmospheric pressure chemical vapor deposition tools provide a feasible process with high throughput, low production as well as low upkeep costs. Furthermore, the deposition of single-sided doped glass layers enables the possibility of a cost-efficient co-diffusion step. Based on diborane, phosphine and oxygen as precursor gases, borosilicate glass (BSG) and phosphorus silicate glass (PSG) layers are deposited, reaching high surface passivation quality after diffusion. In this contribution, we show the influences of an atmospheric treatment in combination with a capping layer on BSG and PSG, respectively. Emitters diffused from such glasses can be used to produce high-efficiency low-cost PERT solar cells.

Zusammenfassung in einer weiteren Sprache

Fachgebiet (DDC)
530 Physik

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37th European Photovoltaic Solar Energy Conference and Exhibition (EUPVSEC) (online), 7. Sept. 2020 - 11. Sept. 2020
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ISO 690GEML, Fabian, Josh ENGELHARDT, Benjamin GAPP, Luis-Frieder REINALTER, Giso HAHN, 2020. Process influences during atmospheric pressure chemical vapor deposition of passivating Si-based doping glasses for PERT solar concepts. 37th European Photovoltaic Solar Energy Conference and Exhibition (EUPVSEC) (online), 7. Sept. 2020 - 11. Sept. 2020. In: 37th European Photovoltaic Solar Energy Conference and Exhibition (EUPVSEC) : Proceedings. München: WIP, 2020, pp. 214-217. eISSN 2196-100X. ISBN 3-936338-73-6
BibTex
@inproceedings{Geml2020Proce-51686,
  year={2020},
  title={Process influences during atmospheric pressure chemical vapor deposition of passivating Si-based doping glasses for PERT solar concepts},
  url={https://www.eupvsec-proceedings.com/proceedings?fulltext=hahn&paper=49633},
  isbn={3-936338-73-6},
  publisher={WIP},
  address={München},
  booktitle={37th European Photovoltaic Solar Energy Conference and Exhibition (EUPVSEC) : Proceedings},
  pages={214--217},
  author={Geml, Fabian and Engelhardt, Josh and Gapp, Benjamin and Reinalter, Luis-Frieder and Hahn, Giso}
}
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Interner Vermerk

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Kontakt
URL der Originalveröffentl.
https://www.eupvsec-proceedings.com/proceedings?fulltext=hahn&paper=49633

Prüfdatum der URL

2020-11-06

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