Publikation:

Elimination of BO-LID in mass production using illuminated annealing in a coupled firing and regeneration tool

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Datum

2018

Autor:innen

Romer, Olaf
Pernau, Thomas

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http://nbn-resolving.de/urn:nbn:de:bsz:352-2-xoi9icg2yfqc2
DOI (zitierfähiger Link)
https://doi.org/10.1063/1.5049321
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Published

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BALLIF, Christophe, ed.. SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics. Melville, NY: AIP Publishing, 2018, 130002. AIP Conference Proceedings. 1999,1. ISSN 0094-243X. eISSN 1551-7616. ISBN 978-0-7354-1715-1. Available under: doi: 10.1063/1.5049321

Zusammenfassung

Elimination of boron-oxygen related degradation (BO-LID) in a coupled fast firing and regeneration belt furnace setup with halogen lamps was investigated. A design of experiment layout was used to systematically change the processing parameters peak firing temperature, belt velocity and illumination intensity in the regeneration tool. The results indicate that a certain threshold illumination intensity is required using typical firing conditions to yield almost complete regeneration. Incomplete regeneration is observed below that threshold intensity. This can be explained by insufficient optical heating and in consequence temperatures too low so that, even though the regeneration process starts as intended, it simply takes too long and is not completed within processing time in the regeneration tool. The results also demonstrate that small variations in firing conditions and precursor quality fluctuations are of minor influence for the regeneration process and that regeneration, for a sufficient illumination setting, can be achieved in a 15 to 30 second timeframe by a regeneration tool based on halogen lamps.

Zusammenfassung in einer weiteren Sprache

Fachgebiet (DDC)
530 Physik

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Konferenz

SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics, 19. März 2018 - 21. März 2018, Lausanne
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ISO 690DERRICKS, Christian, Axel HERGUTH, Giso HAHN, Olaf ROMER, Thomas PERNAU, 2018. Elimination of BO-LID in mass production using illuminated annealing in a coupled firing and regeneration tool. SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics. Lausanne, 19. März 2018 - 21. März 2018. In: BALLIF, Christophe, ed.. SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics. Melville, NY: AIP Publishing, 2018, 130002. AIP Conference Proceedings. 1999,1. ISSN 0094-243X. eISSN 1551-7616. ISBN 978-0-7354-1715-1. Available under: doi: 10.1063/1.5049321
BibTex
@inproceedings{Derricks2018Elimi-43620,
  year={2018},
  doi={10.1063/1.5049321},
  title={Elimination of BO-LID in mass production using illuminated annealing in a coupled firing and regeneration tool},
  number={1999,1},
  isbn={978-0-7354-1715-1},
  issn={0094-243X},
  publisher={AIP Publishing},
  address={Melville, NY},
  series={AIP Conference Proceedings},
  booktitle={SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics},
  editor={Ballif, Christophe},
  author={Derricks, Christian and Herguth, Axel and Hahn, Giso and Romer, Olaf and Pernau, Thomas},
  note={Article Number: 130002}
}
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