@inproceedings{Perani2013Micro-36579,
  year={2013},
  title={Microstructural and electrical properties of nanocrystalline silicon-oxy-nitride layers for photovoltaic applications},
  booktitle={E-MRS 2013 Fall Meeting},
  author={Perani, Martina and Brinkmann, Nils H. and Bauer, Anja and Cavalcoli, Daniela and Terheiden, Barbara}
}

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