Nanostructured silicon for studying fundamental aspects of nanomechanics

Blick, Robert H.; Erbe, Artur; Pescini, Laura; Kraus, Andreas; Scheible, Dominik V.; Beil, Florian W.; Weig, Eva M.; Hörner, Andreas; Kirschbaum, Jochen; Lorenz, Heribert; Kotthaus, Jörg P.

Nanostructured silicon for studying fundamental aspects of nanomechanics

Files

Blick_255388.pdf(2.48 MB)

Date

2002

Authors

Blick, Robert H.

Erbe, Artur

Pescini, Laura

Kraus, Andreas

Scheible, Dominik V.

Beil, Florian W.

Weig, Eva M.

Hörner, Andreas

Kirschbaum, Jochen

Lorenz, Heribert

Show 1 more

Publication type

Journal article

Published in

Journal of Physics: Condensed Matter ; 14 (2002), 34. - pp. R905-R945. - ISSN 0953-8984. - eISSN 1361-648X

Abstract

Nanomechanics features three-dimensional nanostructuring, which allows full exploitation of the mechanical degree of freedom on the nanometre scale. In this work a number of exemplifying experiments on nano-electromechanical systems realized in silicon materials will be presented. First an introduction to the underlying mechanics will be given and finite element methods required for simulations will be discussed. Further topics presented include measurement methods for probing the mechanical properties of free standing nanowires, sensor applications and nonlinear properties of nanomechanical resonators. Other applications such as parametric frequency tuning are demonstrated and the major sources of dissipation are discussed. Finally, an outlook over the fundamental limits of nanoresonators is given.

Subject (DDC)

530 Physics

Cite This

ISO 690

BLICK, Robert H., Artur ERBE, Laura PESCINI, Andreas KRAUS, Dominik V. SCHEIBLE, Florian W. BEIL, Eva M. WEIG, Andreas HÖRNER, Jochen KIRSCHBAUM, Heribert LORENZ, Jörg P. KOTTHAUS, 2002. Nanostructured silicon for studying fundamental aspects of nanomechanics. In: Journal of Physics: Condensed Matter. 14(34), pp. R905-R945. ISSN 0953-8984. eISSN 1361-648X. Available under: doi: 10.1088/0953-8984/14/34/202

BibTex

@article{Blick2002Nanos-25538,
  year={2002},
  doi={10.1088/0953-8984/14/34/202},
  title={Nanostructured silicon for studying fundamental aspects of nanomechanics},
  number={34},
  volume={14},
  issn={0953-8984},
  journal={Journal of Physics: Condensed Matter},
  pages={R905--R945},
  author={Blick, Robert H. and Erbe, Artur and Pescini, Laura and Kraus, Andreas and Scheible, Dominik V. and Beil, Florian W. and Weig, Eva M. and Hörner, Andreas and Kirschbaum, Jochen and Lorenz, Heribert and Kotthaus, Jörg P.}
}

RDF

<rdf:RDF
    xmlns:dcterms="http://purl.org/dc/terms/"
    xmlns:dc="http://purl.org/dc/elements/1.1/"
    xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#"
    xmlns:bibo="http://purl.org/ontology/bibo/"
    xmlns:dspace="http://digital-repositories.org/ontologies/dspace/0.1.0#"
    xmlns:foaf="http://xmlns.com/foaf/0.1/"
    xmlns:void="http://rdfs.org/ns/void#"
    xmlns:xsd="http://www.w3.org/2001/XMLSchema#" > 
  <rdf:Description rdf:about="https://kops.uni-konstanz.de/server/rdf/resource/123456789/25538">
    <dcterms:hasPart rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/25538/1/Blick_255388.pdf"/>
    <dc:contributor>Erbe, Artur</dc:contributor>
    <dspace:hasBitstream rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/25538/1/Blick_255388.pdf"/>
    <dc:contributor>Hörner, Andreas</dc:contributor>
    <dcterms:rights rdf:resource="https://rightsstatements.org/page/InC/1.0/"/>
    <dc:creator>Blick, Robert H.</dc:creator>
    <dc:contributor>Pescini, Laura</dc:contributor>
    <bibo:uri rdf:resource="http://kops.uni-konstanz.de/handle/123456789/25538"/>
    <dc:creator>Kotthaus, Jörg P.</dc:creator>
    <dspace:isPartOfCollection rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <dc:creator>Beil, Florian W.</dc:creator>
    <dc:contributor>Kotthaus, Jörg P.</dc:contributor>
    <dc:creator>Pescini, Laura</dc:creator>
    <dcterms:abstract xml:lang="eng">Nanomechanics features three-dimensional nanostructuring, which allows full exploitation of the mechanical degree of freedom on the nanometre scale. In this work a number of exemplifying experiments on nano-electromechanical systems realized in silicon materials will be presented. First an introduction to the underlying mechanics will be given and finite element methods required for simulations will be discussed. Further topics presented include measurement methods for probing the mechanical properties of free standing nanowires, sensor applications and nonlinear properties of nanomechanical resonators. Other applications such as parametric frequency tuning are demonstrated and the major sources of dissipation are discussed. Finally, an outlook over the fundamental limits of nanoresonators is given.</dcterms:abstract>
    <dc:contributor>Scheible, Dominik V.</dc:contributor>
    <foaf:homepage rdf:resource="http://localhost:8080/"/>
    <dc:contributor>Blick, Robert H.</dc:contributor>
    <dcterms:bibliographicCitation>Journal of physics : Condensed matter ; 14 (2002), 34. - R905-R945</dcterms:bibliographicCitation>
    <dc:contributor>Kirschbaum, Jochen</dc:contributor>
    <dc:creator>Lorenz, Heribert</dc:creator>
    <dc:creator>Kraus, Andreas</dc:creator>
    <dcterms:isPartOf rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <dc:date rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2013-12-19T09:35:13Z</dc:date>
    <dc:creator>Kirschbaum, Jochen</dc:creator>
    <dc:creator>Erbe, Artur</dc:creator>
    <dc:creator>Hörner, Andreas</dc:creator>
    <dc:contributor>Kraus, Andreas</dc:contributor>
    <dc:contributor>Beil, Florian W.</dc:contributor>
    <dc:creator>Weig, Eva M.</dc:creator>
    <dc:contributor>Lorenz, Heribert</dc:contributor>
    <dc:contributor>Weig, Eva M.</dc:contributor>
    <dcterms:issued>2002</dcterms:issued>
    <dc:language>eng</dc:language>
    <dc:rights>terms-of-use</dc:rights>
    <dc:creator>Scheible, Dominik V.</dc:creator>
    <dcterms:title>Nanostructured silicon for studying fundamental aspects of nanomechanics</dcterms:title>
    <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/>
    <dcterms:available rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2013-12-19T09:35:13Z</dcterms:available>
  </rdf:Description>
</rdf:RDF>

Bibliography of Konstanz

No