Time resolved study of excimer laser ablation of thin organic films from a metal surface

dc.contributor.authorHerminghaus, Stephandeu
dc.contributor.authorLeiderer, Paul
dc.date.accessioned2011-03-24T17:52:59Zdeu
dc.date.available2011-03-24T17:52:59Zdeu
dc.date.issued1991deu
dc.description.abstractThe dynamics of pulsed excimer laser ablation of thin films of organic material from a metal surface was investigated using optically excited surface plasmons. The metal substrate is formed by a 500 Ǻ thick silver film adjacent to the base of a glass prism, which serves for optical excitation and detection of the surface plasmons propagating at the silver-vacuum interface. The organic films were prepared by cooling the sample to 77 K and depositing the materials (isopropanol, tetrafluoromethane, acetone) from the vapor phase; ablation of the films was accomplished by KrF excimer laser (λ = 248 nm). Detection of the surface plasmon resonance allows to monitor the ablation process on a nanosecond time scale and with a resolution far better than a monolayer. At the same time, the surface plasmons provide an insitu probe for time-resolved measurements of the substrate temperature. This allows to determinate the temperature at which the ablation sets in. For tetrafluoromethane, the ablation temperature was found to be independent of the laser fluence, suggesting a thermal desorption process. On the other hand, for isopropanol and acetone, a strong dependence of the ablation temperature of the influence was observed. From the large delay between the leading edge of the laser pulse and the onset of ablation, we conclude that ablative photodecomposition is not present in our experiment. There is, however, evidence for laser-induced shemical transformations in the organic films. Solid films of transformed material, which were stable at room-temperature and under atmospheric conditions, were formed during the isopropanol experiments. We suggest these transformation process to be connected to the observed fluence dependence of the ablation temperature.eng
dc.description.versionpublished
dc.format.mimetypeapplication/pdfdeu
dc.identifier.citationFirst publ. in: Process Module Metrology, Control and Clustering, Proceedings of SPIE, Vol. 1594 (1991), pp. 334-343deu
dc.identifier.ppn266049923deu
dc.identifier.urihttp://kops.uni-konstanz.de/handle/123456789/9028
dc.language.isoengdeu
dc.legacy.dateIssued2007deu
dc.rightsAttribution-NonCommercial-NoDerivs 2.0 Generic
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/2.0/
dc.subject.ddc530deu
dc.titleTime resolved study of excimer laser ablation of thin organic films from a metal surfaceeng
dc.typeINPROCEEDINGSdeu
dspace.entity.typePublication
kops.citation.bibtex
@inproceedings{Herminghaus1991resol-9028,
  year={1991},
  title={Time resolved study of excimer laser ablation of thin organic films from a metal surface},
  booktitle={Process Module Metrology , Control and Clustering , Proceedings of SPIE},
  pages={334--343},
  author={Herminghaus, Stephan and Leiderer, Paul}
}
kops.citation.iso690HERMINGHAUS, Stephan, Paul LEIDERER, 1991. Time resolved study of excimer laser ablation of thin organic films from a metal surface. In: Process Module Metrology , Control and Clustering , Proceedings of SPIE. 1991, pp. 334-343deu
kops.citation.iso690HERMINGHAUS, Stephan, Paul LEIDERER, 1991. Time resolved study of excimer laser ablation of thin organic films from a metal surface. In: Process Module Metrology , Control and Clustering , Proceedings of SPIE. 1991, pp. 334-343eng
kops.citation.rdf
<rdf:RDF
    xmlns:dcterms="http://purl.org/dc/terms/"
    xmlns:dc="http://purl.org/dc/elements/1.1/"
    xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#"
    xmlns:bibo="http://purl.org/ontology/bibo/"
    xmlns:dspace="http://digital-repositories.org/ontologies/dspace/0.1.0#"
    xmlns:foaf="http://xmlns.com/foaf/0.1/"
    xmlns:void="http://rdfs.org/ns/void#"
    xmlns:xsd="http://www.w3.org/2001/XMLSchema#" > 
  <rdf:Description rdf:about="https://kops.uni-konstanz.de/server/rdf/resource/123456789/9028">
    <dspace:isPartOfCollection rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <dc:creator>Leiderer, Paul</dc:creator>
    <dc:rights>Attribution-NonCommercial-NoDerivs 2.0 Generic</dc:rights>
    <dcterms:title>Time resolved study of excimer laser ablation of thin organic films from a metal surface</dcterms:title>
    <dc:format>application/pdf</dc:format>
    <dspace:hasBitstream rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/9028/1/102_procspie_1991.pdf"/>
    <dcterms:abstract xml:lang="eng">The dynamics of pulsed excimer laser ablation of thin films of organic material from a metal surface was investigated using optically excited surface plasmons. The metal substrate is formed by a 500 Ǻ thick silver film adjacent to the base of a glass prism, which serves for optical excitation and detection of the surface plasmons propagating at the silver-vacuum interface. The organic films were prepared by cooling the sample to 77 K and depositing the materials (isopropanol, tetrafluoromethane, acetone) from the vapor phase; ablation of the films was accomplished by KrF excimer laser (λ = 248 nm). Detection of the surface plasmon resonance allows to monitor the ablation process on a nanosecond time scale and with a resolution far better than a monolayer. At the same time, the surface plasmons provide an insitu probe for time-resolved measurements of the substrate temperature. This allows to determinate the temperature at which the ablation sets in. For tetrafluoromethane, the ablation temperature was found to be independent of the laser fluence, suggesting a thermal desorption process. On the other hand, for isopropanol and acetone, a strong dependence of the ablation temperature of the influence was observed. From the large delay between the leading edge of the laser pulse and the onset of ablation, we conclude that ablative photodecomposition is not present in our experiment. There is, however, evidence for laser-induced shemical transformations in the organic films. Solid films of transformed material, which were stable at room-temperature and under atmospheric conditions, were formed during the isopropanol experiments. We suggest these transformation process to be connected to the observed fluence dependence of the ablation temperature.</dcterms:abstract>
    <dcterms:hasPart rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/9028/1/102_procspie_1991.pdf"/>
    <dc:creator>Herminghaus, Stephan</dc:creator>
    <dcterms:bibliographicCitation>First publ. in: Process Module Metrology, Control and Clustering, Proceedings of SPIE, Vol. 1594 (1991), pp. 334-343</dcterms:bibliographicCitation>
    <dc:language>eng</dc:language>
    <dcterms:isPartOf rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <foaf:homepage rdf:resource="http://localhost:8080/"/>
    <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/>
    <dcterms:issued>1991</dcterms:issued>
    <dc:contributor>Leiderer, Paul</dc:contributor>
    <dc:contributor>Herminghaus, Stephan</dc:contributor>
    <dcterms:available rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2011-03-24T17:52:59Z</dcterms:available>
    <bibo:uri rdf:resource="http://kops.uni-konstanz.de/handle/123456789/9028"/>
    <dc:date rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2011-03-24T17:52:59Z</dc:date>
    <dcterms:rights rdf:resource="http://creativecommons.org/licenses/by-nc-nd/2.0/"/>
  </rdf:Description>
</rdf:RDF>
kops.description.openAccessopenaccessgreen
kops.flag.knbibliographyfalse
kops.identifier.nbnurn:nbn:de:bsz:352-opus-31043deu
kops.opus.id3104deu
kops.sourcefield<i>Process Module Metrology , Control and Clustering , Proceedings of SPIE</i>. 1991, pp. 334-343deu
kops.sourcefield.plainProcess Module Metrology , Control and Clustering , Proceedings of SPIE. 1991, pp. 334-343deu
kops.sourcefield.plainProcess Module Metrology , Control and Clustering , Proceedings of SPIE. 1991, pp. 334-343eng
relation.isAuthorOfPublication611eb991-101f-4ad3-95e8-a31e03018c51
relation.isAuthorOfPublication.latestForDiscovery611eb991-101f-4ad3-95e8-a31e03018c51
source.bibliographicInfo.fromPage334
source.bibliographicInfo.toPage343
source.bibliographicInfo.volume1594
source.titleProcess Module Metrology , Control and Clustering , Proceedings of SPIE

Dateien

Originalbündel

Gerade angezeigt 1 - 1 von 1
Vorschaubild nicht verfügbar
Name:
102_procspie_1991.pdf
Größe:
804.64 KB
Format:
Adobe Portable Document Format
102_procspie_1991.pdf
102_procspie_1991.pdfGröße: 804.64 KBDownloads: 322