Publikation:

Bulk hydrogenation in mc-Si by PECVD SiNx deposition only

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Herzog_opus-121371.pdf
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2007

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The compiled state-of-the-art of PV solar technology and deployment : 22nd European Photovoltaic Solar Energy Conference, EU PVSEC ; proceedings of the international conference, held in Milan, Italy, 3 - 7 September 2007. München: WIP-Renewable Energies, 2007, pp. 1722-1725

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Recent publications have studied the bulk hydrogenation of mc-Si by PECVD SiNx deposition after a high temperature firing step. Our investigation focuses on the effect of bulk hydrogenation in mc-Si via PECVD SiNx deposition at low temperatures without a subsequent firing step. Tests were performed on p-type String Ribbon wafers, p-type EFG Ribbon wafers and n-type and p-type wafers from mc-Si ingots. Adjacent and neighbouring wafers respectively are used to compare bulk lifetimes after single and double sided SiNx deposition on wafers as grown and after P-gettering. Bulk lifetime was measured spatially resolved with μ-PCD. Surface passivation was done with an iodine-ethanol solution. The bulk hydrogenation effect is detectable for PECVD SiNx deposition only, without additional firing step, but varies for different mc-Si materials. The effect is stronger in H-sensitive materials, however, a general statement for all mc-Si materials is difficult.

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Fachgebiet (DDC)
530 Physik

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Bulk hydrogenation, PECVD-SiN, mc-Si

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EU PVSEC, 3. Sept. 2007 - 7. Sept. 2007, Milan, Italy
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ISO 690HERZOG, Bernhard, Bernd RAABE, Giso HAHN, 2007. Bulk hydrogenation in mc-Si by PECVD SiNx deposition only. EU PVSEC. Milan, Italy, 3. Sept. 2007 - 7. Sept. 2007. In: The compiled state-of-the-art of PV solar technology and deployment : 22nd European Photovoltaic Solar Energy Conference, EU PVSEC ; proceedings of the international conference, held in Milan, Italy, 3 - 7 September 2007. München: WIP-Renewable Energies, 2007, pp. 1722-1725
BibTex
@inproceedings{Herzog2007hydro-872,
  year={2007},
  title={Bulk hydrogenation in mc-Si by PECVD SiN<sub>x</sub> deposition only},
  publisher={WIP-Renewable Energies},
  address={München},
  booktitle={The compiled state-of-the-art of PV solar technology and deployment : 22nd European Photovoltaic Solar Energy Conference, EU PVSEC ; proceedings of the international conference, held in Milan, Italy, 3 - 7 September 2007},
  pages={1722--1725},
  author={Herzog, Bernhard and Raabe, Bernd and Hahn, Giso}
}
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