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Bulk passivation in silicon ribbons : a lifetime study for an enhanced high efficiency process

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2005

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Kaes, Martin
Metz, Axel

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Conference record of the Thirty-First IEEE Photovoltaic Specialists Conference - 2005 : Coronado Springs Resort, Lake Buena Vista, FL, January 3 - 7, 2005. Piscataway, NJ: IEEE Operations Center, 2005, pp. 923-926. ISSN 0160-8371. ISBN 0-7803-8707-4. Available under: doi: 10.1109/PVSC.2005.1488282

Zusammenfassung

The effectiveness of hydrogenation either by deposition plus firing of a PECVD SiN layer in a conventional belt furnace or by remote H-plasma was compared quantitatively using spatially resolved lifetime measurements for EFG and string ribbon. Additionally the effect of a preceding phosphorous gettering on the hydrogenation and the presence of a screen printed rear side aluminum during firing was analyzed. Wafer areas with the presence of a rear side aluminum show additional lifetime improvements for both hydrogenation methods probably due to a gettering effect. With preceding P-gettering hydrogenation by SiN deposition plus firing is superior to remote H-plasma. A synergetic effect of a rear side aluminum as described elsewhere is not obtained. First high efficiency EFG solar cells using a PECVD SiN fired in a conventional belt furnace were processed with efficiencies in the 17-18% range.

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530 Physik

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31st IEEE PVSC, 3. Jan. 2005 - 7. Jan. 2005, Lake Buena Vista
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ISO 690KAES, Martin, Giso HAHN, Axel METZ, 2005. Bulk passivation in silicon ribbons : a lifetime study for an enhanced high efficiency process. 31st IEEE PVSC. Lake Buena Vista, 3. Jan. 2005 - 7. Jan. 2005. In: Conference record of the Thirty-First IEEE Photovoltaic Specialists Conference - 2005 : Coronado Springs Resort, Lake Buena Vista, FL, January 3 - 7, 2005. Piscataway, NJ: IEEE Operations Center, 2005, pp. 923-926. ISSN 0160-8371. ISBN 0-7803-8707-4. Available under: doi: 10.1109/PVSC.2005.1488282
BibTex
@inproceedings{Kaes2005passi-31024,
  year={2005},
  doi={10.1109/PVSC.2005.1488282},
  title={Bulk passivation in silicon ribbons : a lifetime study for an enhanced high efficiency process},
  isbn={0-7803-8707-4},
  issn={0160-8371},
  publisher={IEEE Operations Center},
  address={Piscataway, NJ},
  booktitle={Conference record of the Thirty-First IEEE Photovoltaic Specialists Conference - 2005 : Coronado Springs Resort, Lake Buena Vista, FL, January 3 - 7, 2005},
  pages={923--926},
  author={Kaes, Martin and Hahn, Giso and Metz, Axel}
}
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