Publikation: Microbridge on YBa2Cu307-delta thin film patterned by reversible laser annealing
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A superconducting microbridge (14 μm wide, 140 μm long) on an epitaxial YBa2Cu3O7-d thin film was patterned by using a laser writing technique. The technique is based on a local increase of oxygen diffusion velocicity caused by the heat of a focussed laser beam. Using nitrogen as the ambient atmosphere a deoxygenated (semiconducting) line could be written. A reoxygenated (superconducting)line forming a microbridge could be patterned by scanning the laser beam in ambient oxygen atmosphere perpendicular to the first written line. Neither optical reflection micrographs nor scanninz electron microscopy images have shown any physical damage of the film surface due to this fully planar patterning technique. The reversible properties of the laser writing technique were proved by electrica1 four-point DC measurements between 30 K and 300 K.
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EISENMENGER, Johannes, Christian BRAND, Paul LEIDERER, 1996. Microbridge on YBa2Cu307-delta thin film patterned by reversible laser annealing. In: Physica / C [Superconductivity]. 1996, 262(3-4), pp. 168-172. Available under: doi: 10.1016/0921-4534(96)00238-9BibTex
@article{Eisenmenger1996Micro-5051, year={1996}, doi={10.1016/0921-4534(96)00238-9}, title={Microbridge on YBa2Cu307-delta thin film patterned by reversible laser annealing}, number={3-4}, volume={262}, journal={Physica / C [Superconductivity]}, pages={168--172}, author={Eisenmenger, Johannes and Brand, Christian and Leiderer, Paul} }
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