Stress control of tensile-strained In1−xGaxP nanomechanical string resonators

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dc.contributor.authorBückle, Maximilian
dc.contributor.authorHauber, Valentin C.
dc.contributor.authorCole, Garrett D.
dc.contributor.authorGärtner, Claus
dc.contributor.authorZeimer, Ute
dc.contributor.authorGrenzer, Jörg
dc.contributor.authorWeig, Eva M.
dc.date.accessioned2019-02-20T14:09:11Z
dc.date.available2019-02-20T14:09:11Z
dc.date.issued2018eng
dc.description.abstractWe investigate the mechanical properties of freely suspended nanostrings fabricated from tensile-stressed, crystalline In1−xGaxP. The intrinsic strain arises during epitaxial growth as a consequence of the lattice mismatch between the thin film and the substrate, and is confirmed by x-ray diffraction measurements. The flexural eigenfrequencies of the nanomechanical string resonators reveal an orientation dependent stress with a maximum value of 650 MPa. The angular dependence is explained by a combination of anisotropic Young's modulus and a change of elastic properties caused by defects. As a function of the crystal orientation, a stress variation of up to 50% is observed. This enables fine tuning of the tensile stress for any given Ga content x, which implies interesting prospects for the study of high Q nanomechanical systems.eng
dc.description.versionpublishedde
dc.identifier.arxiv1808.09773v2eng
dc.identifier.doi10.1063/1.5054076eng
dc.identifier.ppn1662406037
dc.identifier.urihttps://kops.uni-konstanz.de/handle/123456789/45131
dc.language.isoengeng
dc.rightsterms-of-use
dc.rights.urihttps://rightsstatements.org/page/InC/1.0/
dc.subject.ddc530eng
dc.titleStress control of tensile-strained In<sub>1−x</sub>Ga<sub>x</sub>P nanomechanical string resonatorseng
dc.typeJOURNAL_ARTICLEde
dspace.entity.typePublication
kops.citation.bibtex
@article{Buckle2018Stres-45131,
  title={Stress control of tensile-strained In<sub>1−x</sub>Ga<sub>x</sub>P nanomechanical string resonators},
  year={2018},
  doi={10.1063/1.5054076},
  number={20},
  volume={113},
  issn={0003-6951},
  journal={Applied Physics Letters},
  author={Bückle, Maximilian and Hauber, Valentin C. and Cole, Garrett D. and Gärtner, Claus and Zeimer, Ute and Grenzer, Jörg and Weig, Eva M.},
  note={Article Number: 201903}
}
kops.citation.iso690BÜCKLE, Maximilian, Valentin C. HAUBER, Garrett D. COLE, Claus GÄRTNER, Ute ZEIMER, Jörg GRENZER, Eva M. WEIG, 2018. Stress control of tensile-strained In1−xGaxP nanomechanical string resonators. In: Applied Physics Letters. 2018, 113(20), 201903. ISSN 0003-6951. eISSN 1077-3118. Verfügbar unter: doi: 10.1063/1.5054076deu
kops.citation.iso690BÜCKLE, Maximilian, Valentin C. HAUBER, Garrett D. COLE, Claus GÄRTNER, Ute ZEIMER, Jörg GRENZER, Eva M. WEIG, 2018. Stress control of tensile-strained In1−xGaxP nanomechanical string resonators. In: Applied Physics Letters. 2018, 113(20), 201903. ISSN 0003-6951. eISSN 1077-3118. Available under: doi: 10.1063/1.5054076eng
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kops.sourcefield.plainApplied Physics Letters. 2018, 113(20), 201903. ISSN 0003-6951. eISSN 1077-3118. Verfügbar unter: doi: 10.1063/1.5054076deu
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