Laser cleaning of polymer surfaces
Laser cleaning of polymer surfaces
Loading...
Date
2001
Authors
Fourrier, T.
Schrems, Gernot
Mühlberger, T.
Heitz, Johannes
Arnold, Nikita
Bäuerle, Dieter
Editors
Journal ISSN
Electronic ISSN
ISBN
Bibliographical data
Publisher
Series
URI (citable link)
DOI (citable link)
International patent number
Link to the license
EU project number
Project
Open Access publication
Collections
Title in another language
Publication type
Journal article
Publication status
Published in
Applied Physics / A, Materials Science and Processing ; 72 (2001), 1. - pp. 1-6
Abstract
We have investigated the removal of small spherical particles from polymer surfaces by means of 193-nm ArF and 248-nm KrF laser light. Polystyrene (PS) particles with diameters in the range of 110 nm to 1700 nm and silica particles (SiO2) with sizes of 400 nm and 800 nm are successfully removed from two different substrates, polyimide (PI) and polymethylmethacrylate (PMMA). Experiments were performed in air (23°C, relative humidity 24% 28%) and in an environment with a relative humidity (RH) of about 90%.
Summary in another language
Subject (DDC)
530 Physics
Keywords
Conference
Review
undefined / . - undefined, undefined. - (undefined; undefined)
Cite This
ISO 690
FOURRIER, T., Gernot SCHREMS, T. MÜHLBERGER, Johannes HEITZ, Nikita ARNOLD, Dieter BÄUERLE, Mario MOSBACHER, Johannes BONEBERG, Paul LEIDERER, 2001. Laser cleaning of polymer surfaces. In: Applied Physics / A, Materials Science and Processing. 72(1), pp. 1-6. Available under: doi: 10.1007/s003390000683BibTex
@article{Fourrier2001Laser-5253, year={2001}, doi={10.1007/s003390000683}, title={Laser cleaning of polymer surfaces}, number={1}, volume={72}, journal={Applied Physics / A, Materials Science and Processing}, pages={1--6}, author={Fourrier, T. and Schrems, Gernot and Mühlberger, T. and Heitz, Johannes and Arnold, Nikita and Bäuerle, Dieter and Mosbacher, Mario and Boneberg, Johannes and Leiderer, Paul} }
RDF
<rdf:RDF xmlns:dcterms="http://purl.org/dc/terms/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#" xmlns:bibo="http://purl.org/ontology/bibo/" xmlns:dspace="http://digital-repositories.org/ontologies/dspace/0.1.0#" xmlns:foaf="http://xmlns.com/foaf/0.1/" xmlns:void="http://rdfs.org/ns/void#" xmlns:xsd="http://www.w3.org/2001/XMLSchema#" > <rdf:Description rdf:about="https://kops.uni-konstanz.de/server/rdf/resource/123456789/5253"> <foaf:homepage rdf:resource="http://localhost:8080/"/> <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/> <dspace:isPartOfCollection rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/> <dc:creator>Mosbacher, Mario</dc:creator> <dcterms:bibliographicCitation>First publ. in: Applied Physics / A, Materials Science and Processing, 72 (2001), 1, pp.1-6</dcterms:bibliographicCitation> <dc:contributor>Heitz, Johannes</dc:contributor> <dc:rights>Attribution-NonCommercial-NoDerivs 2.0 Generic</dc:rights> <dc:contributor>Leiderer, Paul</dc:contributor> <dc:contributor>Fourrier, T.</dc:contributor> <dc:creator>Arnold, Nikita</dc:creator> <dcterms:available rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2011-03-24T14:54:22Z</dcterms:available> <dcterms:rights rdf:resource="http://creativecommons.org/licenses/by-nc-nd/2.0/"/> <dc:creator>Leiderer, Paul</dc:creator> <dc:creator>Heitz, Johannes</dc:creator> <dc:contributor>Boneberg, Johannes</dc:contributor> <dc:language>eng</dc:language> <dcterms:isPartOf rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/> <dspace:hasBitstream rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/5253/1/276_applph_2001.pdf"/> <dc:creator>Schrems, Gernot</dc:creator> <dcterms:title>Laser cleaning of polymer surfaces</dcterms:title> <dc:contributor>Mühlberger, T.</dc:contributor> <dc:contributor>Schrems, Gernot</dc:contributor> <dc:contributor>Bäuerle, Dieter</dc:contributor> <bibo:uri rdf:resource="http://kops.uni-konstanz.de/handle/123456789/5253"/> <dc:contributor>Mosbacher, Mario</dc:contributor> <dc:contributor>Arnold, Nikita</dc:contributor> <dc:creator>Bäuerle, Dieter</dc:creator> <dc:format>application/pdf</dc:format> <dc:creator>Mühlberger, T.</dc:creator> <dc:creator>Fourrier, T.</dc:creator> <dcterms:issued>2001</dcterms:issued> <dcterms:abstract xml:lang="eng">We have investigated the removal of small spherical particles from polymer surfaces by means of 193-nm ArF and 248-nm KrF laser light. Polystyrene (PS) particles with diameters in the range of 110 nm to 1700 nm and silica particles (SiO2) with sizes of 400 nm and 800 nm are successfully removed from two different substrates, polyimide (PI) and polymethylmethacrylate (PMMA). Experiments were performed in air (23°C, relative humidity 24% 28%) and in an environment with a relative humidity (RH) of about 90%.</dcterms:abstract> <dc:creator>Boneberg, Johannes</dc:creator> <dcterms:hasPart rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/5253/1/276_applph_2001.pdf"/> <dc:date rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2011-03-24T14:54:22Z</dc:date> </rdf:Description> </rdf:RDF>
Internal note
xmlui.Submission.submit.DescribeStep.inputForms.label.kops_note_fromSubmitter
Examination date of dissertation
Method of financing
Comment on publication
Alliance license
Corresponding Authors der Uni Konstanz vorhanden
International Co-Authors
Bibliography of Konstanz
Yes