Publikation:

Detection limit of XRF measurements at different synchrotron radiation facilities

Vorschaubild

Dateien

Zuschlag_185062.pdf
Zuschlag_185062.pdfGröße: 92.17 KBDownloads: 89

Datum

2011

Autor:innen

Herausgeber:innen

Kontakt

ISSN der Zeitschrift

Electronic ISSN

ISBN

Bibliografische Daten

Verlag

Schriftenreihe

Auflagebezeichnung

URI (zitierfähiger Link)
http://nbn-resolving.de/urn:nbn:de:bsz:352-185062
DOI (zitierfähiger Link)
https://doi.org/10.4229/26thEUPVSEC2011-2BV.2.45
ArXiv-ID

Internationale Patentnummer

Link zur Lizenz
Urheberrechtlich geschützt

Angaben zur Forschungsförderung

Projekt

Open Access-Veröffentlichung
Open Access Green

Sammlungen

Physik: Publikationen
Core Facility der Universität Konstanz

Gesperrt bis

Titel in einer weiteren Sprache

Publikationstyp
Beitrag zu einem Konferenzband
Publikationsstatus
Published

Erschienen in

OSSENBRINK, H., ed. and others. Proceedings of the 26th European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC). Munich, Germany: WIP-Renewable Energies, 2011, pp. 1547-1549. ISBN 3-936338-27-2. Available under: doi: 10.4229/26thEUPVSEC2011-2BV.2.45

Zusammenfassung

The only possibility to determine the spatial distribution of transition metal precipitates in silicon wafers without destroying the sample is X-Ray Fluorescence (XRF). The purpose of this work is to evaluate the measurement conditions at different synchrotron radiation facilities. Therefore, we prepared metal test structures with different sizes on the surface of a FZ silicon wafer by electron beam lithography. The investigation of metal particles with a known size and distribution allows the determination of the detection limit at different beamline setups. The gained results are important for further experiments based on synchrotron radiation at different facilities and the evaluation of XRF results. This investigation leads also to an optimization of the measurement setup due to focusing on structures with known shape, which results in improved XRF measurement conditions.

Zusammenfassung in einer weiteren Sprache

Fachgebiet (DDC)
530 Physik

Schlagwörter

Defects, Evaluation, Characterisation, Characterization

Konferenz

26th European Photovoltaic Solar Energy Conference and Exhibition, 5. Sept. 2011 - 9. Sept. 2011, Hamburg, Germany
Rezension
undefined / . - undefined, undefined

Forschungsvorhaben

Organisationseinheiten

Zeitschriftenheft

Verknüpfte Datensätze

Zitieren

ISO 690ZUSCHLAG, Annika, Giso HAHN, 2011. Detection limit of XRF measurements at different synchrotron radiation facilities. 26th European Photovoltaic Solar Energy Conference and Exhibition. Hamburg, Germany, 5. Sept. 2011 - 9. Sept. 2011. In: OSSENBRINK, H., ed. and others. Proceedings of the 26th European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC). Munich, Germany: WIP-Renewable Energies, 2011, pp. 1547-1549. ISBN 3-936338-27-2. Available under: doi: 10.4229/26thEUPVSEC2011-2BV.2.45
BibTex
@inproceedings{Zuschlag2011Detec-18506,
  year={2011},
  doi={10.4229/26thEUPVSEC2011-2BV.2.45},
  title={Detection limit of XRF measurements at different synchrotron radiation facilities},
  isbn={3-936338-27-2},
  publisher={WIP-Renewable Energies},
  address={Munich, Germany},
  booktitle={Proceedings of the 26th European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC)},
  pages={1547--1549},
  editor={Ossenbrink, H.},
  author={Zuschlag, Annika and Hahn, Giso}
}
RDF
<rdf:RDF
    xmlns:dcterms="http://purl.org/dc/terms/"
    xmlns:dc="http://purl.org/dc/elements/1.1/"
    xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#"
    xmlns:bibo="http://purl.org/ontology/bibo/"
    xmlns:dspace="http://digital-repositories.org/ontologies/dspace/0.1.0#"
    xmlns:foaf="http://xmlns.com/foaf/0.1/"
    xmlns:void="http://rdfs.org/ns/void#"
    xmlns:xsd="http://www.w3.org/2001/XMLSchema#" > 
  <rdf:Description rdf:about="https://kops.uni-konstanz.de/server/rdf/resource/123456789/18506">
    <dspace:hasBitstream rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/18506/2/Zuschlag_185062.pdf"/>
    <dc:language>eng</dc:language>
    <dc:rights>terms-of-use</dc:rights>
    <dc:creator>Hahn, Giso</dc:creator>
    <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/>
    <dcterms:bibliographicCitation>Publ. in: Proceedings : 26th European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) ; CCH Congress Centre and International Fair, Hamburg, Germany, Conference 5 - 9 September 2011, exhibition 5 - 8 September 2011 / ed. by H. Ossenbrink ... - München : WIP Renewable Energies, 2011. - S. 1547-1549. - ISBN 3-936338-27-2. - [DVD-ROM]</dcterms:bibliographicCitation>
    <dc:date rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2012-02-29T09:28:09Z</dc:date>
    <dc:contributor>Zuschlag, Annika</dc:contributor>
    <dcterms:available rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2012-02-29T09:28:09Z</dcterms:available>
    <foaf:homepage rdf:resource="http://localhost:8080/"/>
    <dc:contributor>Hahn, Giso</dc:contributor>
    <dcterms:isPartOf rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <dspace:isPartOfCollection rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <dcterms:abstract xml:lang="eng">The only possibility to determine the spatial distribution of transition metal precipitates in silicon wafers without destroying the sample is X-Ray Fluorescence (XRF). The purpose of this work is to evaluate the measurement conditions at different synchrotron radiation facilities. Therefore, we prepared metal test structures with different sizes on the surface of a FZ silicon wafer by electron beam lithography. The investigation of metal particles with a known size and distribution allows the determination of the detection limit at different beamline setups. The gained results are important for further experiments based on synchrotron radiation at different facilities and the evaluation of XRF results. This investigation leads also to an optimization of the measurement setup due to focusing on structures with known shape, which results in improved XRF measurement conditions.</dcterms:abstract>
    <dcterms:title>Detection limit of XRF measurements at different synchrotron radiation facilities</dcterms:title>
    <dcterms:rights rdf:resource="https://rightsstatements.org/page/InC/1.0/"/>
    <dcterms:hasPart rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/18506/2/Zuschlag_185062.pdf"/>
    <dc:creator>Zuschlag, Annika</dc:creator>
    <bibo:uri rdf:resource="http://kops.uni-konstanz.de/handle/123456789/18506"/>
    <dcterms:issued>2011</dcterms:issued>
  </rdf:Description>
</rdf:RDF>

Interner Vermerk

xmlui.Submission.submit.DescribeStep.inputForms.label.kops_note_fromSubmitter

Kontakt
URL der Originalveröffentl.

Prüfdatum der URL

Prüfungsdatum der Dissertation

Finanzierungsart

Kommentar zur Publikation

Allianzlizenz
Corresponding Authors der Uni Konstanz vorhanden
Internationale Co-Autor:innen
Universitätsbibliographie
Ja
Begutachtet
Diese Publikation teilen