Detection limit of XRF measurements at different synchrotron radiation facilities

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OSSENBRINK, H., ed. and others. Proceedings of the 26th European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC). Munich, Germany: WIP-Renewable Energies, 2011, pp. 1547-1549. ISBN 3-936338-27-2. Available under: doi: 10.4229/26thEUPVSEC2011-2BV.2.45
Zusammenfassung

The only possibility to determine the spatial distribution of transition metal precipitates in silicon wafers without destroying the sample is X-Ray Fluorescence (XRF). The purpose of this work is to evaluate the measurement conditions at different synchrotron radiation facilities. Therefore, we prepared metal test structures with different sizes on the surface of a FZ silicon wafer by electron beam lithography. The investigation of metal particles with a known size and distribution allows the determination of the detection limit at different beamline setups. The gained results are important for further experiments based on synchrotron radiation at different facilities and the evaluation of XRF results. This investigation leads also to an optimization of the measurement setup due to focusing on structures with known shape, which results in improved XRF measurement conditions.

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Fachgebiet (DDC)
530 Physik
Schlagwörter
Defects, Evaluation, Characterisation, Characterization
Konferenz
26th European Photovoltaic Solar Energy Conference and Exhibition, 5. Sept. 2011 - 9. Sept. 2011, Hamburg, Germany
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Zitieren
ISO 690ZUSCHLAG, Annika, Giso HAHN, 2011. Detection limit of XRF measurements at different synchrotron radiation facilities. 26th European Photovoltaic Solar Energy Conference and Exhibition. Hamburg, Germany, 5. Sept. 2011 - 9. Sept. 2011. In: OSSENBRINK, H., ed. and others. Proceedings of the 26th European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC). Munich, Germany: WIP-Renewable Energies, 2011, pp. 1547-1549. ISBN 3-936338-27-2. Available under: doi: 10.4229/26thEUPVSEC2011-2BV.2.45
BibTex
@inproceedings{Zuschlag2011Detec-18506,
  year={2011},
  doi={10.4229/26thEUPVSEC2011-2BV.2.45},
  title={Detection limit of XRF measurements at different synchrotron radiation facilities},
  isbn={3-936338-27-2},
  publisher={WIP-Renewable Energies},
  address={Munich, Germany},
  booktitle={Proceedings of the 26th European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC)},
  pages={1547--1549},
  editor={Ossenbrink, H.},
  author={Zuschlag, Annika and Hahn, Giso}
}
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