Effects of electrode distance and target angles on elemental concentrations and film properties of Al-doped ZnO films prepared by magnetron co-sputtering

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Gorgulla_0-346557.pdf(887.69 KB)
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2015
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urn:nbn:de:bsz:352-0-346557
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10.4229/EUPVSEC20152015-3DV.2.21
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31st European Photovoltaic Solar Energy Conference and Exhibition : proceedings of the international conference held in Hamburg, Germany, 14 September - 18 September 2015. - München : WIP, 2015. - pp. 1310-1314. - ISBN 3-936338-39-6
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530 Physics
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TCO, AZO, ZnO:Al, heterojunction solar cells, magnetron sputtering, oblique angle deposition
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31st European Photovoltaic Solar Energy Conference and Exhibition, Sep 14, 2015 - Sep 18, 2015, Hamburg
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ISO 690GORGULLA, Angelika, Kay HAGEDORN, Giso HAHN, Barbara TERHEIDEN, 2015. Effects of electrode distance and target angles on elemental concentrations and film properties of Al-doped ZnO films prepared by magnetron co-sputtering. 31st European Photovoltaic Solar Energy Conference and Exhibition. Hamburg, Sep 14, 2015 - Sep 18, 2015. In: 31st European Photovoltaic Solar Energy Conference and Exhibition : proceedings of the international conference held in Hamburg, Germany, 14 September - 18 September 2015. München:WIP, pp. 1310-1314. ISBN 3-936338-39-6. Available under: doi: 10.4229/EUPVSEC20152015-3DV.2.21
BibTex
@inproceedings{Gorgulla2015Effec-34586,
  year={2015},
  doi={10.4229/EUPVSEC20152015-3DV.2.21},
  title={Effects of electrode distance and target angles on elemental concentrations and film properties of Al-doped ZnO films prepared by magnetron co-sputtering},
  isbn={3-936338-39-6},
  publisher={WIP},
  address={München},
  booktitle={31st European Photovoltaic Solar Energy Conference and Exhibition : proceedings of the international conference held in Hamburg, Germany, 14 September - 18 September 2015},
  pages={1310--1314},
  author={Gorgulla, Angelika and Hagedorn, Kay and Hahn, Giso and Terheiden, Barbara}
}
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