Effects of electrode distance and target angles on elemental concentrations and film properties of Al-doped ZnO films prepared by magnetron co-sputtering
Effects of electrode distance and target angles on elemental concentrations and film properties of Al-doped ZnO films prepared by magnetron co-sputtering
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2015
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31st European Photovoltaic Solar Energy Conference and Exhibition : proceedings of the international conference held in Hamburg, Germany, 14 September - 18 September 2015. - München : WIP, 2015. - pp. 1310-1314. - ISBN 3-936338-39-6
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530 Physics
Keywords
TCO, AZO, ZnO:Al, heterojunction solar cells, magnetron sputtering, oblique angle deposition
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31st European Photovoltaic Solar Energy Conference and Exhibition, Sep 14, 2015 - Sep 18, 2015, Hamburg
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GORGULLA, Angelika, Kay HAGEDORN, Giso HAHN, Barbara TERHEIDEN, 2015. Effects of electrode distance and target angles on elemental concentrations and film properties of Al-doped ZnO films prepared by magnetron co-sputtering. 31st European Photovoltaic Solar Energy Conference and Exhibition. Hamburg, Sep 14, 2015 - Sep 18, 2015. In: 31st European Photovoltaic Solar Energy Conference and Exhibition : proceedings of the international conference held in Hamburg, Germany, 14 September - 18 September 2015. München:WIP, pp. 1310-1314. ISBN 3-936338-39-6. Available under: doi: 10.4229/EUPVSEC20152015-3DV.2.21BibTex
@inproceedings{Gorgulla2015Effec-34586, year={2015}, doi={10.4229/EUPVSEC20152015-3DV.2.21}, title={Effects of electrode distance and target angles on elemental concentrations and film properties of Al-doped ZnO films prepared by magnetron co-sputtering}, isbn={3-936338-39-6}, publisher={WIP}, address={München}, booktitle={31st European Photovoltaic Solar Energy Conference and Exhibition : proceedings of the international conference held in Hamburg, Germany, 14 September - 18 September 2015}, pages={1310--1314}, author={Gorgulla, Angelika and Hagedorn, Kay and Hahn, Giso and Terheiden, Barbara} }
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