Automatic etch pit density analysis in multicrystalline silicon

Cite This

Files in this item

Files Size Format View

There are no files associated with this item.

HAHN, Giso, Martin FLECK, 2020. Automatic etch pit density analysis in multicrystalline silicon. In: Computational Materials Science. Elsevier. 183, 109886. ISSN 0927-0256. eISSN 1879-0801. Available under: doi: 10.1016/j.commatsci.2020.109886

@article{Hahn2020-10Autom-50334, title={Automatic etch pit density analysis in multicrystalline silicon}, year={2020}, doi={10.1016/j.commatsci.2020.109886}, volume={183}, issn={0927-0256}, journal={Computational Materials Science}, author={Hahn, Giso and Fleck, Martin}, note={Article Number: 109886} }

<rdf:RDF xmlns:dcterms="" xmlns:dc="" xmlns:rdf="" xmlns:bibo="" xmlns:dspace="" xmlns:foaf="" xmlns:void="" xmlns:xsd="" > <rdf:Description rdf:about=""> <dcterms:available rdf:datatype="">2020-07-21T11:26:55Z</dcterms:available> <dspace:isPartOfCollection rdf:resource=""/> <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/> <dc:creator>Fleck, Martin</dc:creator> <dc:language>eng</dc:language> <dcterms:title>Automatic etch pit density analysis in multicrystalline silicon</dcterms:title> <dc:rights>terms-of-use</dc:rights> <dc:contributor>Hahn, Giso</dc:contributor> <bibo:uri rdf:resource=""/> <dcterms:rights rdf:resource=""/> <dcterms:isPartOf rdf:resource=""/> <dcterms:abstract xml:lang="eng">This publication contains a description and is published in combination with the source code for a tool capable of determining the etch pit density (EPD) on multicrystalline silicon image data. The algorithm is capable of classifying grain boundaries and polishing scratches and removes these structures from the analysis result. Included with the analysis code are methods for plotting EPD maps as well as relative EPD frequency. This is combined with a brief description of the experimental steps of wafer preparation and defect etching as well as a discussion of the analysis limitations.</dcterms:abstract> <foaf:homepage rdf:resource="http://localhost:8080/jspui"/> <dcterms:issued>2020-10</dcterms:issued> <dc:creator>Hahn, Giso</dc:creator> <dc:contributor>Fleck, Martin</dc:contributor> <dc:date rdf:datatype="">2020-07-21T11:26:55Z</dc:date> </rdf:Description> </rdf:RDF>

This item appears in the following Collection(s)

Search KOPS


My Account