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Thermisch behandelte Titan-Siliziumnitrid-Schichten zur elektrischen Kontaktierung von kristallinem Silizium

Thermisch behandelte Titan-Siliziumnitrid-Schichten zur elektrischen Kontaktierung von kristallinem Silizium

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EMRE, Erkan, 2019. Thermisch behandelte Titan-Siliziumnitrid-Schichten zur elektrischen Kontaktierung von kristallinem Silizium [Dissertation]. Konstanz: University of Konstanz

@phdthesis{Emre2019Therm-47948, title={Thermisch behandelte Titan-Siliziumnitrid-Schichten zur elektrischen Kontaktierung von kristallinem Silizium}, year={2019}, author={Emre, Erkan}, address={Konstanz}, school={Universität Konstanz} }

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