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Gettering efficacy of an APCVD glasses based stacked co-diffusion for bifacial mc-Si PERT solar cells

Gettering efficacy of an APCVD glasses based stacked co-diffusion for bifacial mc-Si PERT solar cells

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FICHTNER, Johannes, Annika ZUSCHLAG, Giso HAHN, 2019. Gettering efficacy of an APCVD glasses based stacked co-diffusion for bifacial mc-Si PERT solar cells. SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics. Leuven, Belgium, Apr 8, 2019 - Apr 10, 2019. In: POORTMANS, Jef, ed. and others. SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics : 8-10 April 2019, Leuven, Belgium. Melville, New York:AIP Publishing, 140002. eISSN 0094-243X. ISBN 978-0-7354-1892-9. Available under: doi: 10.1063/1.5123889

@inproceedings{Fichtner2019Gette-46842, title={Gettering efficacy of an APCVD glasses based stacked co-diffusion for bifacial mc-Si PERT solar cells}, year={2019}, doi={10.1063/1.5123889}, number={2147,1}, isbn={978-0-7354-1892-9}, address={Melville, New York}, publisher={AIP Publishing}, series={AIP Conference Proceedings}, booktitle={SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics : 8-10 April 2019, Leuven, Belgium}, editor={Poortmans, Jef}, author={Fichtner, Johannes and Zuschlag, Annika and Hahn, Giso}, note={Article Number: 140002} }

terms-of-use eng 2019-09-12T11:25:29Z 2019-09-12T11:25:29Z Fichtner, Johannes Gettering efficacy of an APCVD glasses based stacked co-diffusion for bifacial mc-Si PERT solar cells Zuschlag, Annika Hahn, Giso Hahn, Giso 2019 Gettering of impurities is an important task in p-type mc-Si solar cell production. Phosphorus diffusion via POCl<sub>3</sub> is currently the most common way to achieve this. We report about the gettering efficacy of a co-diffusion in which POCl<sub>3</sub> is not used. Phosphorus and boron containing glasses are both deposited prior to the diffusion via atmospheric pressure chemical vapor deposition (APCVD). The presented APCVD glasses based co-diffusion allows a loading without spacing and therefore has the potential for a very high throughput. As we demonstrate in this work, the overall gettering efficacy in different kinds of stacks is similar to the gettering efficacy in non-stacked APCVD glasses based diffusions. The reduction of interstitial iron in the analyzed lifetime samples is ascribed to phosphorus diffusion gettering and works in stacks just as well. Fichtner, Johannes Zuschlag, Annika

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