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Picosecond Photoacoustic Metrology of SiO<sub>2</sub> and LiNbO<sub>3</sub> Layer Systems Used for High Frequency Surface-Acoustic-Wave Filters

Picosecond Photoacoustic Metrology of SiO2 and LiNbO3 Layer Systems Used for High Frequency Surface-Acoustic-Wave Filters

Type of Publication: Journal article
Publication status: Published
URI (citable link): http://nbn-resolving.de/urn:nbn:de:bsz:352-2-1p3c4jifukz814
Author: Brick, Delia; Emre, Erkan; Grossmann, Martin; Dekorsy, Thomas; Hettich, Mike
Year of publication: 2017
Published in: Applied Sciences ; 7 (2017), 8. - 822. - eISSN 2076-3417
DOI (citable link): https://dx.doi.org/10.3390/app7080822
Summary:
Many applications of thin films necessitate detailed information about their thicknesses and sound velocities. Here, we study SiO2/LiNbO3 layer systems by picosecond photoacoustic metrology and measure the sound velocities of the respective layers and the film thickness of SiO2, which pose crucial information for the fabrication of surface-acoustic-wave filters for communication technology. Additionally, we utilize the birefringence and the accompanying change in the detection sensitivity of coherent acoustic phonons in the LiNbO3 layer to infer information about the LiNbO3 orientation and the layer interface.
Subject (DDC): 530 Physics
Keywords: picosecond photoacoustic metrology; LiNbO3; SiO2; surface-acoustic-wave filters
Link to License: In Copyright
Bibliography of Konstanz: Yes

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BRICK, Delia, Erkan EMRE, Martin GROSSMANN, Thomas DEKORSY, Mike HETTICH, 2017. Picosecond Photoacoustic Metrology of SiO2 and LiNbO3 Layer Systems Used for High Frequency Surface-Acoustic-Wave Filters. In: Applied Sciences. 7(8), 822. eISSN 2076-3417. Available under: doi: 10.3390/app7080822

@article{Brick2017-08-10Picos-40417, title={Picosecond Photoacoustic Metrology of SiO2 and LiNbO3 Layer Systems Used for High Frequency Surface-Acoustic-Wave Filters}, year={2017}, doi={10.3390/app7080822}, number={8}, volume={7}, journal={Applied Sciences}, author={Brick, Delia and Emre, Erkan and Grossmann, Martin and Dekorsy, Thomas and Hettich, Mike}, note={Article Number: 822} }

Brick, Delia Picosecond Photoacoustic Metrology of SiO<sub>2</sub> and LiNbO<sub>3</sub> Layer Systems Used for High Frequency Surface-Acoustic-Wave Filters Hettich, Mike Brick, Delia Dekorsy, Thomas Emre, Erkan 2017-10-25T11:58:44Z Grossmann, Martin Hettich, Mike Dekorsy, Thomas eng 2017-08-10 Emre, Erkan terms-of-use 2017-10-25T11:58:44Z Many applications of thin films necessitate detailed information about their thicknesses and sound velocities. Here, we study SiO<sub>2</sub>/LiNbO<sub>3 </sub>layer systems by picosecond photoacoustic metrology and measure the sound velocities of the respective layers and the film thickness of SiO<sub>2</sub>, which pose crucial information for the fabrication of surface-acoustic-wave filters for communication technology. Additionally, we utilize the birefringence and the accompanying change in the detection sensitivity of coherent acoustic phonons in the LiNbO<sub>3</sub> layer to infer information about the LiNbO<sub>3</sub> orientation and the layer interface. Grossmann, Martin

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