Layer Transfer from Chemically Etched 150 mm Porous Si Substrates

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TERHEIDEN, Barbara, Jan HENSEN, Andreas WOLF, Renate HORBELT, Heiko PLAGWITZ, Rolf BRENDEL, 2011. Layer Transfer from Chemically Etched 150 mm Porous Si Substrates. In: Materials. 4(5), pp. 941-952. eISSN 1996-1944. Available under: doi: 10.3390/ma4050941

@article{Terheiden2011Layer-31559, title={Layer Transfer from Chemically Etched 150 mm Porous Si Substrates}, year={2011}, doi={10.3390/ma4050941}, number={5}, volume={4}, journal={Materials}, pages={941--952}, author={Terheiden, Barbara and Hensen, Jan and Wolf, Andreas and Horbelt, Renate and Plagwitz, Heiko and Brendel, Rolf} }

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